Aerosol Deposition (AD) Integration Techniques and their Application to Microdevices

Ceramic Integration and Joining Technologies: From Macro to Nanoscale

Volumn , Issue , 2011, Pages 489-520

  Akedo, Jun ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

AD on electroceramic film; Aerosol deposition (AD); Deposition; Film patterning

Indexed keywords

EID: 84885721539     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9781118056776.ch16     Document Type: Chapter

References (69)

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