Study on rapid micro-structuring using Jet molding - Present status and structuring properties toward HARMST

Microsystem Technologies

Volumn 6, Issue 6, 2000, Pages 205-209

  Akedo, J ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0043283285     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420000055     Document Type: Article

References (10)

1. Massood T (1998) MICROACTUATORS, Boston, Dordrecht, London: Kluwer Academic Publishers.
2. Lotfi A; Bruce Van Dover R; Schneemeyer L; Steigerwald M (1998) Micro-transformer devices using thin-film electroplated deposition., Proceedings of IEEE APEC'98, pp 1511-1515.
3. Ide T; Mori Y; Konta I; Ikawa N; Yagi H (1991) A film formation method using hypervelocity microparticle impact by electrostatic acceleration. J. Prec. Eng. Jpn., 57 (5): 143-148.
4. Kasyu S; Fuchita E; Manabe T; Hayashi C (1984) Deposition of ultra fine particles using a gas jet., Jpn. J. Appl. Phys. 23 (12): 910-912.
5. Rao N; et al. (1998) Hypersonic plasma particle deposition of nanostructured silicon and silicon carbide., J. Aerosol Sci., 29 (5/6): 707-720.
6. Akedo J; Ichiki M; Kikuchi K; Maeda R (1998) Jet molding system for realization of three dimensional micro-structure., Sensors & Actuators A-Phys., 69 (6): 106-112.
7. 3) thick film deposited with aerosol deposition method., Jpn. J. Appl. Phys. 38 (9B): 5397-5401.
8. Akedo J (1999) Deposition method using ultrafine particle beam and its applications. Ouyou Buturi, 68 (1): 44-47 (in Japanese).
9. Dirks A; and Leamy H (1977) Columnar microstructure in vapor-deposited thin films., Thin Solid Films, 47: 219-233.
10. Akedo J; et al. (1999) Electrical properties of direct deposited piezoelectric thick film formed by gas deposition method., Ferroelectrics, 231 (7): 873-880.