Microstructure and optical properties of Fe-doped ZnO thin films prepared by DC magnetron sputtering

Journal of Crystal Growth

Volumn 371, Issue , 2013, Pages 126-129

  Gao, Fei ^a   Liu, Xiao Yan ^a   Zheng, Li Yun ^a   Li, Mei Xia ^a   Bai, Yong Mei ^a   Xie, Juan ^a  

^a HEBEI UNIVERSITY OF ENGINEERING   (China)

Author keywords

DC magnetron sputtering; Fe doped; PL; XRD; ZnO thin films

Indexed keywords

ATOMIC FORCE MICROSCOPY; CONDUCTION BANDS; CRYSTAL ORIENTATION; CRYSTAL STRUCTURE; ELECTRON TRANSITIONS; FILM PREPARATION; MAGNETRON SPUTTERING; METALLIC FILMS; MICROSTRUCTURE; OPTICAL FILMS; OPTICAL PROPERTIES; PHOTOLUMINESCENCE; SINGLE CRYSTALS; SPUTTERING; X RAY DIFFRACTION; ZINC OXIDE;

CRYSTAL QUALITIES; DC MAGNETRON SPUTTERING; FE-DOPED; PHOTOLUMINESCENCE PEAK; PHOTOLUMINESCENCE SPECTRUM; PREFERRED ORIENTATIONS; ULTRAVIOLET PEAKS; ZNO THIN FILM;

THIN FILMS;

EID: 84885675066     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2013.02.027     Document Type: Article

References (18)

1. A. Miyake, H. Kominami, H. Tatsuoka, H. Kuwabara, Y. Nakanishi, Y. Hatanaka, Luminescent properties of ZnO thin films grown epitaxially on Si substrate, Journal of Crystal Growth 214-215 (2000) 294-298.
2. D. H. Lee, K. H. Park, S. Kim, S. Y. Lee, Effect of Ag doping on the performance of ZnO thin film transistor, Thin Solid Films 520 (2011) 1160-1164.
3. 2/Si substrate, Journal of Crystal Growth 293 (2006) 299-304. (Pubitemid 44128500)
4. J. Nomoto, T. Hirano, T. Miyata, T. Minami, Preparation of Al-doped ZnO transparent electrodes suitable for thin-film solar cell applications by various types of magnetron sputtering depositions, Thin Solid Films 520 (2011) 1400-1406.
5. Y. Zhang, S. Yan, Y. Liu, Y. Tian, G. Liu, Y. Chen, L. Mei, J. P. Liub, Ferromagnetic resonance study on Fe-ZnO inhomogeneous magnetic semiconductors, Solid State Communications 140 (2006) 405-409. (Pubitemid 44633301)
6. J. Elanchezhiyan, K. P. Bhuvana, N. Gopalakrishnan, B. C. Shin, W. J. Lee, T. Balasubramanian, Realization of room temperature ferromagnetism in Zn1-xCrxO thin films grown by RF magnetron sputtering, Journal of Alloys and Compounds 468 (2009) 7-10.
7. X. Zhao, E. Liu, R. V. Ramanujan, J. Chen, Effects of rapid thermal annealing on structural, magnetic and optical properties of Ni-doped ZnO thin films, Current Applied Physics 3 (2012) 834-840.
8. T. Nagata, A. Ashida, N. Fujimura, T. Ito, Electro-optic effect in ZnO:Mn thin films, Journal of Alloys and Compounds 371 (2004) 157-159.
9. F. Gao, L. X. Tan, Z. H. Wu, X. Y. Liu, Microstructural and optical properties of ZnO/(Ni) thin films prepared by DC magnetron sputtering, Journal of Alloys and Compounds 484 (2009) 489-493.
10. A. Baranowska-Korczyc, A. Reszka, K. Sobczak, B. Sikora, P. Dziawa, M. Aleszkiewicz, L. Klopotowski, W. Paszkowicz, P. Dluzewski, B. J. Kowalski, T. A. Kowalewski, M. Sawicki, D. Elbaum, K. Fronc, Magnetic Fe doped ZnO nanofibers obtained by electrospinning, Journal of Sol-Gel Science and Technology 61 (2012) 494-500.
11. Lin-hua Xu, Xiang-yin Li, Influence of Fe-doping on the structural and optical properties of ZnO thin films prepared by sol-gel method, Journal of Crystal Growth 312 (2010) 851-855.
12. S. Chattopadhyay, T. K. Nath, A. J. Behan, J. R. Neal, D. Score, Q. Feng, A. M. Fox, G. A. Gehring, Enhancement of room temperature ferromagnetism of Fedoped ZnO epitaxial thin films with Al co-doping, Journal of Magnetism and Magnetic Materials 323 (2011) 1033-1039.
13. B. B. Straumal, A. A. Mazilkin, S. G. Protasova, A. A. Myatiev, P. B. Straumal, B. Baretzky, Increase of Co solubility with decreasing grain size in ZnO, Acta Materialia 56 (2008) 6246-6256.
14. B. Straumal, B. Baretzky, A. Mazilkin, S. Protasova, A. Myatiev, P. Straumal, Increase of Mn solubility with decreasing grain size in ZnO, Journal of the European Ceramic Society 29 (2009) 1963-1970.
15. 3 (0001) by radio-frequency sputtering, Journal of Applied Physics 96 (2004) 4150-4153.
16. xO films, Thin Solid Films 515 (2007) 5462-5465. (Pubitemid 46507550)
17. C. Z. Wang, Z. Chen, Y. He, L. Y. Li, D. Zhang, Structure, morphology and properties of Fe-doped ZnO films prepared by facing-target magnetron sputtering system, Applied Surface Science 255 (2009) 6881-6887.
18. P. Sundara Venkatesh, V. Purushothaman, S. Esakki Muthu, S. Arumugam, V. Ramakrishnan, K. Jeganathan, K. Ramamurthi, Role of point defects on the enhancement of room temperature ferromagnetism in ZnO nanorods, Crystal Engineering Communication 14 (2012) 4713-4718.