Characterization of ZnO thin films deposited on diamond-like carbon coated onto Si and SiO2/Si substrate

Journal of Crystal Growth

Volumn 293, Issue 2, 2006, Pages 299-304

  Yang, Chengtao ^a   Zeng, Zeyu ^a   Chen, Zhu ^a   Liu, Jinsong ^a   Zhang, Shuren ^a  

^a UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

A1. Diamond like carbon; A1. Stress; A1. Thin films; A1. ZnO; A2. Piezoelectric; B1. Sputtering

Indexed keywords

DEPOSITION; DIAMOND LIKE CARBON FILMS; SILICA; SILICON; SUBSTRATES; ZINC OXIDE;

A1. DIAMOND-LIKE CARBON; A1. STRESS; A1. THIN FILMS; A1. ZNO; A2. PIEZOELECTRIC; B1. SPUTTERING;

THIN FILMS;

EID: 33746435732     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2006.04.101     Document Type: Article

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