Meniscus-mask lithography for narrow graphene nanoribbons

ACS Nano

Volumn 7, Issue 8, 2013, Pages 6894-6898

  Abramova, Vera ^a   Slesarev, Alexander S ^a   Tour, James M ^a,b,c  

^a RICE UNIVERSITY   (United States)

^b Rice University   (United States)

^c RICE UNIVERSITY   (United States)

Author keywords

graphene nanoribbons; meniscus mask lithography; metallic wires; reactive ion etching

Indexed keywords

ATMOSPHERIC WATER; DIVERSE MATERIALS; GRAPHENE NANORIBBONS; GRAPHENE NANORIBBONS (GNRS); HIGH ASPECT RATIO; LITHOGRAPHY TOOLS; METALLIC WIRE; TARGET MATERIALS;

ASPECT RATIO; ELECTRONIC PROPERTIES; GRAPHENE; LITHOGRAPHY; REACTIVE ION ETCHING; WIRE;

NANORIBBONS;

EID: 84883238774     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn403057t     Document Type: Article

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