Monolithic fabrication of film bulk acoustic resonators above integrated circuit by adhesive-bonding-based film transfer

IEEE International Ultrasonics Symposium, IUS

Volumn , Issue , 2012, Pages 1047-1050

  Kochhar, Abhay ^a   Matsumura, Takeshi ^b   Zhang, Guoqiang ^c   Pokharel, Ramesh ^c   Hashimoto, Ken Ya ^d   Esashi, Masayoshi ^a   Tanaka, Shuji ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b NATIONAL INSTITUTE OF INFORMATION AND COMMUNICATIONS TECHNOLOGY   (Japan)

^c KYUSHU UNIVERSITY   (Japan)

^d CHIBA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BENZOCYCLOBUTENE; CHEMICAL TREATMENTS; FABRICATION OF THIN FILMS; FABRICATION PROCESS; FILM BULK ACOUSTIC RESONATORS; HIGH RESISTIVITY; INTEGRATION PROCESS; MONOLITHIC FABRICATIONS;

ALUMINUM COATINGS; CHEMICAL BONDS; FABRICATION; SILICON;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 84882414428     PISSN: 19485719     EISSN: 19485727     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2012.0262     Document Type: Conference Paper

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