Lithium-niobate-based surface acoustic wave oscillator directly integrated with CMOS sustaining amplifier

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 59, Issue 8, 2012, Pages 1800-1805

  Tanaka, Shuji ^a   Park, Kyeongdong ^b   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b SAMSUNG Electronics   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATION TECHNOLOGIES; KEY PROCESS; LOW PHASE NOISE; LOW TEMPERATURES; PLASMA SURFACES; POLYMER BONDING; SAW OSCILLATORS; SAW RESONATORS; SURFACE ACOUSTIC WAVE OSCILLATORS; THERMAL EXPANSION MISMATCH;

ACOUSTIC SURFACE WAVE DEVICES; INTEGRATION; LITHIUM; NIOBIUM COMPOUNDS; PHASE NOISE; SILICON WAFERS;

WAFER BONDING;

EID: 84865352801     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2012.2384     Document Type: Article

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