Low-voltage PZT-actuated MEMS switch monolithically integrated with CMOS circuit

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2012, Pages 1153-1156

  Kousuke, Matsuo ^a   Moriyama, Masaaki ^a   Esashi, Masayoshi ^a   Tanaka, Shuji ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AU ELECTROPLATING; CMOS CIRCUITS; CMOS COMPATIBLE; CMOS WAFERS; DUMMY WAFERS; HIGH TEMPERATURE; LOW VOLTAGES; LOW-VOLTAGE; MEMS SWITCHES; MONOLITHICALLY INTEGRATED; POLYMER BONDING; PZT; SWITCH STRUCTURE;

CMOS INTEGRATED CIRCUITS; ELECTRIC SWITCHES; MEMS; SILICON WAFERS; SOL-GEL PROCESS;

WAFER BONDING;

EID: 84860490312     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2012.6170367     Document Type: Conference Paper

References (6)

1. Kei Kuwabara et al., "Low-Actuation-Voltage RF MEMS Devices and Their Integration with a CMOS LSI", The 24th Sensor Symposium, Tokyo, October, 2007, pp. 41-44
2. G. M. Rebeiz, "RF MEMS: Theory, Design, and Technology", Wiley-Interscince, 2003
3. Tsung-Kuan A. Chou et al., "Billion-Cycle ULV Electrostatic RF MEMS Switch", Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head Island, South Carolina, June 4-8, 2006, pp. 78-81
4. G. Klaasse, R. Puers, H.A.C. Tilmans, "Piezoelectric versus electrostatic actuation for a capacitive RF-MEMS switch," in SeSens Proc., Veldhoven, The Netherlands, November, 2002, pp. 631-634
5. Roland Guerre et al., "Wafer-Level Transfer Technologies for PZT-Based RF MEMS Switches", J. Microelectromech. Syst., 19, 3, pp. 548-560
6. Farizah Saharil et al., "Low-Temperature CMOS-Comatible 3D-Integration of Monocrystalline- Silicon Based PZT RF MEMS Switch Actuators on RF Substrates", IEEE MEMS 2010, Hong Kong, China, January 24-28, 2010, pp. 47-50