Ion charge state distributions of al and cr in cathodic arc plasmas from composite cathodes in vacuum, argon, nitrogen, and oxygen

IEEE Transactions on Plasma Science

Volumn 41, Issue 8, 2013, Pages 1929-1937

  Franz, Robert ^a   Polcik, Peter ^b   Anders, Andre ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b PLANSEE COMPOSITE MATERIALS GMBH   (Germany)

Author keywords

AlCr; cathodic arc; composite cathode; ionization; process gas

Indexed keywords

ALCR; CATHODIC ARC; CHARGE EXCHANGE COLLISION; CHARGE STATE DISTRIBUTION; CHARGE-EXCHANGE CROSS SECTIONS; COMPOSITE CATHODE; ION CHARGE STATE DISTRIBUTION; PROCESS GAS;

ALUMINUM; ELECTRIC DISCHARGES; GASES; IONIZATION; IONIZATION OF GASES; METAL IONS;

CATHODES;

EID: 84882310869     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2013.2254135     Document Type: Article

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