Huge increase in gas phase nanoparticle generation by pulsed direct current sputtering in a reactive gas admixture

Applied Physics Letters

Volumn 103, Issue 3, 2013, Pages

  Polonskyi, Oleksandr ^a,b   Peter, Tilo ^b   Mohammad Ahadi, Amir ^b   Hinz, Alexander ^b   Strunskus, Thomas ^b   Zaporojtchenko, Vladimir ^b   Biederman, Hynek ^a   Faupel, Franz ^b  

^a CHARLES UNIVERSITY   (Czech Republic)

^b UNIVERSITY OF KIEL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CONTINUOUS OPERATION; DC SPUTTERING; GAS AGGREGATION CLUSTER SOURCES; GAS-PHASE NANOPARTICLES; HIGH POWER; PULSED DIRECT CURRENT; PULSED DISCHARGE; REACTIVE GAS;

NANOPARTICLES;

TITANIUM OXIDES;

EID: 84881512652     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4816036     Document Type: Article

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