Morphology of titanium nanocluster films prepared by gas aggregation cluster source

Plasma Processes and Polymers

Volumn 8, Issue 7, 2011, Pages 640-650

  Drábik, Martin ^a   Choukourov, Andrei ^a   Artemenko, Anna ^a   Kousal, Jaroslav ^a   Polonskyi, Oleksandr ^a   Solaå, Pavel ^a   Kylián, Ondåej ^a   Matoušek, Jindåich ^a   Pešička, Josef ^a   Matolínová, Iva ^a   Slavínská, Danka ^a   Biederman, Hynek ^a  

^a CHARLES UNIVERSITY   (Czech Republic)

Author keywords

ageing; gas aggregation cluster source; morphology; nanocluster; TiO 2

Indexed keywords

AFM; AGEING; ARGON PRESSURE; CHEMICAL COMPOSITIONS; DEPOSITED METAL; FILM SURFACES; GAS AGGREGATION; GAS AGGREGATION CLUSTER SOURCE; NANOCLUSTER FILMS; PLANAR MAGNETRON; ROOM TEMPERATURE; TIO; WORKING GAS; WORKING GAS PRESSURE;

ARGON; CRYSTAL STRUCTURE; DIFFRACTION; GASES; MAGNETRONS; NANOCLUSTERS; TITANIUM; TITANIUM DIOXIDE; TOPOGRAPHY;

FILM PREPARATION;

EID: 79960274031     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.201000126     Document Type: Article

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