Efficiency of cluster generation in a magnetron discharge

EPL

Volumn 91, Issue 6, 2010, Pages

  Kashtanov, P V ^a   Smirnov, B M ^a   Hippler, R ^b  

^a JOINT INSTITUTE FOR HIGH TEMPERATURES   (Russian Federation)

^b UNIVERSITY OF GREIFSWALD   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 78751649444     PISSN: 02955075     EISSN: 12864854     Source Type: Journal    
DOI: 10.1209/0295-5075/91/63001     Document Type: Article

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