Transfer of thin Au films to polydimethylsiloxane (PDMS) with reliable bonding using (3-mercaptopropyl)trimethoxysilane (MPTMS) as a molecular adhesive

Journal of Micromechanics and Microengineering

Volumn 23, Issue 8, 2013, Pages

  Byun, Ikjoo ^a   Coleman, Anthony W ^b   Kim, Beomjoon ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b UNIVERSITÉ CLAUDE BERNARD LYON 1   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESIVE TAPES; BONDING MECHANISM; DEPOSITION METHODS; LINKER MOLECULES; LIQUID DEPOSITION; POLYDIMETHYLSILOXANE PDMS; SILICON SUBSTRATES; TRIMETHOXYSILANE;

ADHESION; DEPOSITION; GOLD; GOLD DEPOSITS; MICROCHANNELS; WAFER BONDING;

SILICONES;

EID: 84881123295     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/23/8/085016     Document Type: Article

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