Stretchable gold conductors embedded in PDMS and patterned by photolithography: Fabrication and electromechanical characterization

Journal of Micromechanics and Microengineering

Volumn 20, Issue 5, 2010, Pages

  Adrega, T ^a   Lacour, S P ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

APPLIED STRAIN; DISTRIBUTED NETWORKS; ELASTOMERIC SUBSTRATES; ELECTRICAL RESPONSE; ELECTRONIC DEVICE; METAL FILM; METALLIC THIN FILMS; MICROPATTERNED; MINIMUM FEATURE SIZES; NORMAL DIRECTION; POLYDIMETHYLSILOXANE PDMS; STANDARD PHOTOLITHOGRAPHY;

CRACKS; GOLD; METALLIC FILMS; MICROCHANNELS; MICROELECTRODES; PHOTOLITHOGRAPHY; STRAIN;

SILICONES;

EID: 77951999470     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/5/055025     Document Type: Article

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