Nanofabrication with the helium ion microscope

Materials Research Society Symposium Proceedings

Volumn 1412, Issue , 2011, Pages 43-48

  Boden, Stuart A ^a   Moktadir, Zakaria ^a   Alkhalil, Feras M ^a   Mizuta, Hiroshi ^a   Rutt, Harvey N ^a   Bagnall, Darren M ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

HELIUM ION MICROSCOPE (HIM); HELIUM ION MICROSCOPES; IMAGING TOOLS; IMPLANTED HELIUM; MATERIAL MODIFICATIONS; NANOELECTRONIC DEVICES; PATTERN GENERATOR; SILICON ON INSULATOR;

ATOMIC FORCE MICROSCOPY; ION MICROSCOPES; MILLING (MACHINING); RAPID PROTOTYPING;

NANOTECHNOLOGY;

EID: 84880534182     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/opl.2012.978     Document Type: Conference Paper

References (9)

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5. S. A. Boden, Z. Moktadir, D. M. Bagnall, H. Mizuta, and H. N. Rutt, "Focused helium ion beam milling and deposition," Microelectronic Engineering, vol. 88, pp. 2452-2455, Nov. 2011.
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9. F. Alkhalil, H. Chong, A. Ferguson, Y. Tsuchiya, and H. Mizuta, "Design and Analysis of Double Spin Qubits Integrated on Ultra-thin Silicon-on-insulator," in ESSDERC, 2010, pp. 1-4.