Toward three-dimensional microelectronic systems: Directed self-assembly of silicon microcubes via DNA surface functionalization

Langmuir

Volumn 29, Issue 26, 2013, Pages 8410-8416

  Lammerhardt, Nico ^a   Merzsch, Stephan ^a   Ledig, Johannes ^a   Bora, Achyut ^a,b   Waag, Andreas ^a   Tornow, Marc ^a,b   Mischnick, Petra ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

3-AMINOPROPYL TRIMETHOXYSILANE; ELECTRICAL CHARACTERIZATION; MICRO CONTACT PRINTING; MICROELECTRONIC SYSTEMS; OLIGONUCLEOTIDE IMMOBILIZATION; SCANNING ELECTRON MICROSCOPE; SELF-ASSEMBLING MONOLAYERS; SILICON ON INSULATOR WAFERS;

AGGLOMERATION; AGGREGATES; ATOMIC FORCE MICROSCOPY; DIMERS; DNA; ELECTRIC PROPERTIES; ELECTRON DEVICE MANUFACTURE; FLUORESCENCE MICROSCOPY; INTELLIGENT SYSTEMS; MICROELECTRONICS; OLIGONUCLEOTIDES; PARALLEL PROCESSING SYSTEMS; PHOTOLITHOGRAPHY; SCANNING ELECTRON MICROSCOPY; SELF ASSEMBLY; SILICON; THREE DIMENSIONAL;

SILICON WAFERS;

3 AMINOPROPYLTRIMETHOXYSILANE; 3-AMINOPROPYLTRIMETHOXYSILANE; ACID ANHYDRIDE; GLUTARIC ACID DERIVATIVE; GLUTARIC ANHYDRIDE; NANOMATERIAL; OLIGONUCLEOTIDE; PROPYLAMINE; SILANE DERIVATIVE; SILICON; SINGLE STRANDED DNA;

ARTICLE; ARTIFICIAL INTELLIGENCE; ATOMIC FORCE MICROSCOPY; CHEMISTRY; ELECTRIC CONDUCTIVITY; EQUIPMENT; FLUORESCENCE MICROSCOPY; HUMAN; METHODOLOGY; MICROTECHNOLOGY; NANOTECHNOLOGY; NUCLEIC ACID HYBRIDIZATION; SURFACE PROPERTY; ULTRASTRUCTURE;

ANHYDRIDES; ARTIFICIAL INTELLIGENCE; DNA, SINGLE-STRANDED; ELECTRIC CONDUCTIVITY; GLUTARATES; HUMANS; MICROSCOPY, ATOMIC FORCE; MICROSCOPY, FLUORESCENCE; MICROTECHNOLOGY; NANOSTRUCTURES; NANOTECHNOLOGY; NUCLEIC ACID HYBRIDIZATION; OLIGONUCLEOTIDES; PROPYLAMINES; SILANES; SILICON; SURFACE PROPERTIES;

EID: 84880233436     PISSN: 07437463     EISSN: 15205827     Source Type: Journal    
DOI: 10.1021/la401558f     Document Type: Article

References (39)

1. Bain, C. D.; Trougton, E. B.; Tao, Y.-T; Evall, J.; Whitesides, G. M.; Nuzzo, R. G. Formation of monolayer films by the spontaneous assembly of organic thiols from solution onto gold J. Am. Chem. Soc. 1989, 111, 321-335
2. Love, J. C.; Estroff, L. A.; Kriebel, J. K.; Nuzzo, R. G.; Whitesides, G. M. Self-Assembled Monolayers of Thiolates on Metals as a Form of Nanotechnology Chem. Rev. 2005, 105, 1103-1169
3. Maoz, R.; Sagiv, J. On the formation and structure of self-assembling monolayers. I. A comparative atr-wettability study of Langmuir-Blodgett and adsorbed films on flat substrates and glass microbeads J. Colloid Interface Sci. 1984, 100, 465-496
4. Gun, J.; Iscovici, R.; Sagiv, J. On the formation and structure of self-assembling monolayers: II. A comparative study of Langmuir-Blodgett and adsorbed films using ellipsometry and IR reflection-absorption spectroscopy J. Colloid Interface Sci. 1984, 101, 201-213
5. Gun, J.; Sagiv, J. On the formation and structure of self-assembling monolayers: III. Time of formation, solvent retention, and release J. Colloid Interface Sci. 1986, 112, 457-472
6. Onclin, S.; Ravoo, B. J.; Reinhoudt, D. N. Engineering Silicon Oxide Surfaces Using Self-Assembled Monolayers Angew. Chem., Int. Ed. 2005, 44, 6282-6304
7. Manifar, T.; Rezaee, A.; Sheikhzadeh, M.; Mittler, S. Formation of uniform self-assembly monolayers by choosing the right solvent: OTS on silicon wafer, a case study Appl. Surf. Sci. 2008, 254, 4611-4619
8. Hanson, E. L.; Schwartz, J.; Nickel, B.; Koch, N.; Danisman, M. F. Bonding Self-Assembled, Compact Organophosphonate Monolayers to the Native Oxide Surface of Silicon J. Am. Chem. Soc. 2003, 125, 16074-16080
9. Ito, T.; Forman, S. M.; Cao, C.; Li, F.; Eddy, C. R.; Mastro, M. A.; Holm, R. T.; Henry, R. L.; Hohn, K. L.; Edgar, J. H. Self-Assembled Monolayers of Alkylphosphonic Acid on GaN Substrates Langmuir 2008, 24, 6630-6635
10. Kang, B. S.; Pearton, S. J.; Chen, J. J.; Ren, F.; Johnson, J. W.; Therrien, R. J.; Rajagopal, P.; Roberts, J. C.; Piner, E. L.; Linthicum, K. J. Electrical detection of deoxyribonucleic acid hybridization with AlGaN/GaN high electron mobility transistors Appl. Phys. Lett. 2006, 89, 122102
11. Kang, B. S.; Wang, H. T.; Lele, T. P.; Tseng, Y.; Rena, F.; Pearton, S. J.; Johnson, J. W.; Rajagopal, P.; Roberts, J. C.; Piner, E. L.; Linthicum, K. J. Prostate specific antigen detection using AlGaN/GaN high electron mobility transistors Appl. Phys. Lett. 2007, 91, 112106
12. Kang, B. S.; Ren, F.; Wang, L.; Lofton, C.; Tan, W. W.; Pearton, S. J.; Daviran, A.; Osynsky, A.; Chow, P. P. Electrical detection of immobilized proteins with ungated AlGaN/GaN high-electron-mobility Transistors Appl. Phys. Lett. 2005, 87, 023508
13. Baur, B.; Howgate, J.; von Ribbeck, H.-G.; Gawlina, Y.; Bandalo, V.; Steinhoff, G.; Stutzmann, M.; Eickhoff, M. Catalytic activity of enzymes immobilized on AlGaN/GaN solution gate field-effect transistors Appl. Phys. Lett. 2006, 89, 183901
14. Dulcey, C. S.; Georger, J. H.; Krauthamer, V.; Stenger, D. A.; Fare, T. L.; Calvert, J. M. Deep UV photochemistry of chemisorbed monolayers: patterned coplanar molecular assemblies Science 1991, 252, 551-554
15. Sugimura, H.; Hanji, T.; Takai, O.; Masuda, T.; Misawa, H. Photolithography based on organosilane self-assembled monolayer resist Electrochim. Acta 2001, 47, 103-107
16. Lee, J. P.; Sung, M. M. A New Patterning Method Using Photocatalytic Lithography and Selective Atomic Layer Deposition J. Am. Chem. Soc. 2004, 126, 28-29
17. Weimann, T.; Geyer, W.; Hinze, P.; Stadler, V.; Eck, W.; Gölzhäuser, A. Nanoscale patterning of self-assembled monolayers by e-beam lithography Microelectron. Eng. 2001, 57-58, 903-907
18. Kumar, A.; Biebuyck, H. A.; Whitesides, G. M. Patterning Self-Assembled Monolayers: Applications in Materials Science Langmuir 1994, 10, 1498-1511
19. Kumar, A.; Whitesides, G. M. Features of gold having micrometer to centimeter dimensions can be formed through a combination of stamping with an elastomeric stamp and an alkanethiol ''ink'' followed by chemical etching Appl. Phys. Lett. 1993, 63, 2002-2004
20. Jeon, N. L.; Finnie, K.; Branshaw, K.; Nuzzo, R. G. Formation and Patterning of Self-Assembled Monolayers Derived from Long-Chain Organosilicon Amphiphiles and Their Use as Templates in Materials Microfabrication Langmuir 1997, 13, 3382-3391
21. Yang, Y.; Hori, M.; Hayakawa, T.; Nogami, M. Self-assembled 3-dimensional arrays of Au@SiO2 core-shell nanoparticles for enhanced optical nonlinearities Surf. Sci. 2005, 579, 215-224
22. Sarathy, K. V.; Thomas, P. J.; Kulkarni, G. U.; Rao, C. N. R. Superlattices of Metal and Metal-Semiconductor Quantum Dots Obtained by Layer-by-Layer Deposition of Nanoparticle Arrays J. Phys. Chem. B 1999, 103, 399-401
23. Nakakubo, T.; Shimoyama, I. Three-dimensional micro self-assembly using bridging flocculation Sens. Actuators 2000, 83, 161-166
24. Cannon, A. H.; Hua, Y.; Henderson, C. L.; King, W. P. Self-assembly for three-dimensional integration of functional electrical components J. Micromech. Microeng. 2005, 15, 2172-2178
25. Tien, J.; Breen, T. L.; Whitesides, G. M. Crystallization of Millimeter-Scale Objects with Use of Capillary Forces J. Am. Chem. Soc. 1998, 120, 12670-12671
26. Bowden, N.; Arias, F.; Deng, T.; Whitesides, G. M. Self-Assembly of Microscale Objects at a Liquid/Liquid Interface through Lateral Capillary Forces Langmuir 2001, 17, 1757-1765
27. Clark, T. D.; Tien, J.; Duffy, D. C.; Paul, K. E.; Whitesides, G. M. Self-Assembly of 10-μm-Sized Objects into Ordered Three-Dimensional Arrays J. Am. Chem. Soc. 2001, 123, 7677-7682
28. Rycenga, M.; McLellan, J. M.; Xia, Y. Controlling the Assembly of Silver Nanocubes through Selective Functionalization of Their Faces Adv. Mater. 2008, 20, 2416-2420
29. Mirkin, C. A.; Letsinger, R. L.; Mucic, R. C.; Storhoff, J. J. A DNA-based method for rationally assembling nanoparticles into macroscopic materials Nature 1996, 382, 607-609
30. Zhang, H.; Li, Z.; Mirkin, C. A. Dip-pen nanolithography-based methodology for preparing arrays of nanostructures functionalized with oligonucleotides Adv. Mater. 2002, 14, 1472-1474
31. Alberti, M.; Yacoub-George, E.; Hell, W.; Landesberger, C.; Bock, K. Biomolecular self-assembly of micrometer sized silica beads on patterned glass substrates Appl. Surf. Sci. 2009, 255, 7759-7765
32. Baur, B.; Steinhoff, G.; Hernando, J.; Purrucker, O.; Tanaka, M.; Nickel, B.; Stutzmann, M.; Eickhoff, M. Chemical functionalization of GaN and AlN surfaces Appl. Phys. Lett. 2005, 87, 263901
33. Simpkins, B. S.; McCoy, K. M.; Whitman, L. J.; Pehrsson, P. E. Fabrication and characterization of DNA-functionalized GaN nanowires Nanotechnology 2007, 18, 355301
34. Minier, M.; Salmain, M.; Yacoubi, N.; Barbes, L.; Méthivier, C.; Zanna, S.; Pradier, C. Covalent Immobilization of Lysozyme on Stainless Steel. Interface Spectroscopic Characterization and Measurement of Enzymatic Activity Langmuir 2005, 21, 5957-5965
35. Vandenberg, E. T.; Bertilsson, L.; Liedberg, B.; Uvdal, K.; Erlandsson, R.; Elwing, H.; Lundström, I. Structure of 3-aminopropyl-triethoxy silane on silicon oxide J. Colloid Interface Sci. 1991, 147, 103-118
36. Styrkas, D. A.; Keddie, J. L.; Lu, J. R.; Su, T. J.; Zhdan, P. A. Structure of self-assembled layers on silicon: Combined use of spectroscopic variable angle ellipsometry, neutron reflection, and atomic force microscopy J. Appl. Phys. 1999, 85, 868-875
37. Ulman, A. An Introduction to Ultrathin Organic Films; Academic Press: Boston, 1991.
38. Alivisatos, A. P.; Arndt, M. F.; Efrima, S.; Waldeck, D. H.; Harris, C. B. Electronic energy transfer at semiconductor interfaces. I. Energy transfer from two-dimensional molecular films to Si(111) J. Chem. Phys. 1987, 86, 6540-6549
39. Braun, E.; Eichen, Y.; Sivan, U.; Ben-Yoseph, G. DNA-templated assembly and electrode attachment of a conducting silver wire Nature 1998, 391, 775-778