Influence of irradiation dose on laser-induced surface nanostructures on silicon

Applied Surface Science

Volumn 278, Issue , 2013, Pages 62-66

  Varlamova, Olga ^a,b   Bounhalli, Mourad ^a,c   Reif, Juergen ^a,b  

^a BRANDENBURG UNIVERSITY OF TECHNOLOGY   (Germany)

^b Cottbus JointLab ^*  (Germany)

^c UNIVERSITÉ JEAN MONNET   (France)

Author keywords

Femtosecond ablation; Laser induced periodic structures (ripples); Self organized structure formation; Silicon

Indexed keywords

POLARIZATION; SILICON;

DIFFERENT MECHANISMS; DIFFERENT STRUCTURE; FEMTOSECOND ABLATION; LASER INDUCED PERIODIC STRUCTURES; LASER POLARIZATION; LASER-INDUCED PERIODIC SURFACE STRUCTURES; SELF ORGANIZED STRUCTURES; SURFACE NANOSTRUCTURE;

PERIODIC STRUCTURES;

EID: 84878552887     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2012.10.140     Document Type: Conference Paper

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