In situ observation of self-organizing nanodot formation under nanosecond-pulsed laser irradiation on Si surface

Journal of Applied Physics

Volumn 108, Issue 10, 2010, Pages

  Watanabe, S ^a   Yoshida, Y ^a   Kayashima, S ^a,d   Yatsu, S ^a   Kawai, M ^b   Kato, T ^c  

^a HOKKAIDO UNIVERSITY   (Japan)

^b HIGH ENERGY ACCELERATOR RESEARCH ORGANIZATION KEK   (Japan)

^c HITACHI LTD   (Japan)

^d KYUSHU ELECTRIC POWER CO INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC CLUSTERS; HIGH VOLTAGE ELECTRON MICROSCOPE; IN-SITU OBSERVATIONS; LASER IRRADIATIONS; LASER SHOTS; NANO-DOT ARRAYS; NANODOTS; NANOSECOND PULSED LASER; PULSED LASER IRRADIATION; SELF ORGANIZING; SELF-ORGANIZATIONS; SI SURFACES; SUB-WAVELENGTH;

ELECTRON MICROSCOPES; IRRADIATION; NANOSTRUCTURED MATERIALS;

PULSED LASERS;

EID: 78650260113     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3512888     Document Type: Conference Paper

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