The hole shrink problem: Theoretical studies of directed self-assembly in cylindrical confinement

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8680, Issue , 2013, Pages

  Laachi, Nabil ^a   Delaney, Kris T ^a   Kim, Bongkeun ^a   Hur, Su Mi ^a,b,d   Bristol, Robert ^c   Shykind, David ^c   Weinheimer, Corey J ^c   Fredrickson, Glenn H ^a,b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b University of California   (United States)

^c INTEL CORPORATION   (United States)

^d UNIVERSITY OF CHICAGO   (United States)

Author keywords

Contact holes; Directed self assembly; Graphoepitaxy; Hole shrink problem; Self consistent field theory (SCFT); VIA lithography

Indexed keywords

CONTACT HOLES; DIRECTED SELF-ASSEMBLY; GRAPHOEPITAXY; HOLE SHRINK PROBLEM; SELF-CONSISTENT-FIELD THEORY;

BLOCK COPOLYMERS; CYLINDERS (SHAPES); LITHOGRAPHY; MEAN FIELD THEORY; MOLECULAR ORBITALS; MORPHOLOGY;

SELF ASSEMBLY;

EID: 84878395156     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.2011198     Document Type: Conference Paper

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