Focused electron-beam induced deposition of plasmonic nanostructures from aqueous solutions

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8613, Issue , 2013, Pages

  Bresin, M ^a   Nehru, N ^a   Hastings, J T ^a  

^a UNIVERSITY OF KENTUCKY   (United States)

Author keywords

electron beam induced deposition; liquid precursors; nanofabrication; surface plasmon resonance

Indexed keywords

DIRECT-WRITE DEPOSITION; ELECTRON BEAM-INDUCED DEPOSITION; FOCUSED ELECTRON BEAMS; IMPURITY INCORPORATION; LIQUID PRECURSORS; LOCALIZED SURFACE PLASMON RESONANCE; NANOPARTICLE GEOMETRIES; PLASMONIC NANOSTRUCTURES;

DEPOSITS; LIQUIDS; NANOPARTICLES; NANOTECHNOLOGY; PHOTOMASKS; SURFACE PLASMON RESONANCE;

PLASMONS;

EID: 84878130092     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.2005242     Document Type: Conference Paper

References (19)

1. A. W. Sanders, D. A. Routenberg, B. J. Wiley et al., "Observation of Plasmon Propagation, Redirection, and Fan-Out in Silver Nanowires," Nano Letters, 6(8), 1822-1826 (2006).
2. J. N. Anker, W. P. Hall, O. Lyandres et al., "Biosensing with plasmonic nanosensors," Nature Materials, 7(6), 442-453 (2008).
3. H. A. Atwater, and A. Polman, "Plasmonics for improved photovoltaic devices," Nature Materials, 9(3), 205-213 (2010).
4. M. Rycenga, C. M. Cobley, J. Zeng et al., "Controlling the Synthesis and Assembly of Silver Nanostructures for Plasmonic Applications," Chemical Reviews, 111(6), 3669-3712 (2011).
5. F. De Angelis, C. Liberale, M. L. Coluccio et al., "Emerging fabrication techniques for 3D nano-structuring in plasmonics and single molecule studies," Nanoscale, 3(7), 2689-2696 (2011).
6. I. Utke, P. Hoffmann, and J. Melngailis, "Gas-assisted focused electron beam and ion beam processing and fabrication," Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 26(4), 1197-1276 (2008).
7. S. J. Randolph, J. D. Fowlkes, and P. D. Rack, "Focused, Nanoscale Electron-Beam-Induced Deposition and Etching," Critical Reviews in Solid State and Material Sciences, 31, 55-89 (2006).
8. W. F. v. Dorp, and C. W. Hagen, "A critical literature review of focused electron beam induced deposition," Journal of Applied Physics, 104(8), 081301 (2008).
9. W. F. van Dorp, B. van Someren, C. W. Hagen et al., "Approaching the Resolution Limit of Nanometer- Scale Electron Beam-Induced Deposition," Nano Letters, 5(7), 1303-1307 (2005).
10. A. Botman, J. J. L. Mulders, and C. W. Hagen, "Creating pure nanostructures from electron-beam-induced deposition using purification techniques: a technology perspective," Nanotechnology, 20(37), 372001 (2009).
11. V. Halka, M. J. Schmid, V. Avrutskiy et al., "Electron-Beam-Induced Deposition of Metallic Microstructures from a Molten-Salt Film on Conductive and Nonconductive Substrates," Angewandte Chemie International Edition, 50(20), 4692-4695 (2011).
12. P. Roy, R. Lynch, and P. Schmuki, "Electron beam induced in-vacuo Ag deposition on TiO2 from ionic liquids," Electrochemistry Communications, 11(8), 1567-1570 (2009).
13. R. Abargues, J. Marqués-Hueso, J. Canet-Ferrer et al., "High-resolution electron-beam patternable nanocomposite containing metal nanoparticles for plasmonics," Nanotechnology, 19(35), 355308 (2008).
14. E. U. Donev, and J. T. Hastings, "Electron-Beam-Induced Deposition of Platinum from a Liquid Precursor," Nano Letters, 9(7), 2715-2718 (2009).
15. G. Schardein, E. U. Donev, and J. T. Hastings, "Electron-beam- induced deposition of gold from aqueous solutions," Nanotechnology, 22(1), 015301 (2011).
16. E. U. Donev, G. Schardein, J. C. Wright et al., "Substrate effects on the electron-beam-induced deposition of platinum from a liquid precursor," Nanoscale, 3(7), 2709-2717 (2011).
17. A. Chamberlain, E. U. Donev, C. Samantaray et al., "Electron-Beam Induced Deposition of Transition Metals from Bulk Liquids: Ag, Cr, and Ni," 55th International Conference on Electron, Ion, and Photon Beams and Nanofabrication. (2011).
18. L. E. Ocola, A. Joshi-Imre, C. Kessel et al., "Growth characterization of electron-beam-induced silver deposition from liquid precursor," Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 30(6), 06FF08-7 (2012).
19. D. C. Skillman, and C. R. Berry, "Spectral extinction of colloidal silver," Journal of the Optical Society of America, 63(6), 707-713 (1973).