Dielectric breakdown of PDMS thin films

Journal of Micromechanics and Microengineering

Volumn 23, Issue 6, 2013, Pages

  Gerratt, Aaron P ^a   Bergbreiter, Sarah ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BREAKDOWN FIELD; ELECTRODE GAP; ELECTRODE GEOMETRIES; ELECTROMECHANICAL MICROSYSTEMS; PERFORMANCE LIMITS; POLYDIMETHYLSILOXANE PDMS; SILICON ELECTRODE; STRONG DEPENDENCES;

ELECTRIC BREAKDOWN; MICROCHANNELS; PLASTIC FILMS;

SILICONES;

EID: 84878117088     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/23/6/067001     Document Type: Article

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