Electrical breakdown phenomena for devices with micron separations

Journal of Micromechanics and Microengineering

Volumn 16, Issue 7, 2006, Pages 1366-1373

  Chen, Ching Heng ^a   Yeh, J Andrew ^a   Wang, Pei Jen ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC BREAKDOWN; ELECTRIC POTENTIAL; ELECTRODES; FABRICATION; GAS DYNAMICS; GEOMETRY; THERMAL INSULATION;

ELECTROSTATIC ACTUATED MEMS DEVICES; GASEOUS DIELECTRICS; INSULATION DESIGN; MEMS ELECTRODES;

MICROELECTROMECHANICAL DEVICES;

EID: 33745077359     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/7/034     Document Type: Article

References (20)

1. Tabib-Azar M 1998 Microactuators (Dordrecht: Kluwer) pp 37-85
2. Madou M J 2002 Fundamentals of Microfabrication: The Science of Miniaturization (Boca Raton, FL: CRC Press) p 551
3. Paschen F 1889 Wied. Ann. 37 69-96
4. Xiong J, Zhou Z, Ye X, Wang X and Feng Y 2003 Research on electric field and electric breakdown problems of a micro-colloid thruster Sensors Actuators A 108 134-7
5. Nasser E 1971 Fundamentals of Gaseous Ionization and Plasma Electronics (New York: Wiley-Interscience) pp 219-48
6. Dakin T W, Luxa G, Oppermann G, Vigreux J, Wind G and Winkelnkemper H 1974 Breakdown of gases in uniform fields; paschen curves for nitrogen, air and sulfur hexfluoride Electra 32 61-82
7. Boyle W S, Kisliuk P and Germer L H 1955 Electrical breakdown in high vacuum J. Appl. Phys. 26 720
8. Germer L H 1959 Electrical breakdown between close electrodes in air J. Appl. Phys. 30 46
9. Schaffert R M 1971 Electrophotography (London: Focal Press) pp 516-17
10. Dhariwal R S, Torres J M and Desmulliez M P Y 2000 Electric field breakdown at micro-meter separations in air and nitrogen at atmospheric pressure IEE Proc. Sci. Meas. Technol. 147 261-5
11. Slade P G and Taylor E D 2002 Electrical breakdown in atmospheric air between closely spaced electrical contacts IEEE Proc. Electron. Control p 245
12. Lee R T, Chung H H and Chiou Y C 2001 Arc erosion behavior of silver electric contacts in a single arc discharge across a static gap IEE Proc. Sci. Meas. Technol. 148 8
13. Radmilovic-Radjenovic M, Lee J K, Iza F and Park G Y 2005 Particle-in-cell simulation of gas breakdown in microgaps J. Phys. D: Appl. Phys. 38 950-4
14. Ono T, Sim D Y and Esashi M 2000 Micro-discharge and electric breakdown in a micro-gap J. Micromech. Microeng. 10 445-51
15. Wallash A and Levit L 2003 Electrical breakdown and ESD phenomena for devices with nanometer-to-micron gaps Proc. SPIE 4980 87-96
16. Wilson C G, Wendt A E and Gianchandani Y B 2003 High voltage constraints for vacuum packaged microstructures IEEE J. Microelectromech. Syst. 12 445-51
17. Raizer Y P 1991 Gas Discharge Physics (New York: Springer) pp 327-8
18. Wang H C 2003 Micro Electromechanical Systems Technology and Applications (Hsinchu, Taiwan: PIDC) pp 210-25 (in Chinese)
19. Guerry A, Gondran C F H and Miller K 2004 Sidewall roughness measurement: a comparison of in- and off-AFM techniques ASMC '04 (4-6 May 2004) pp 221-6
20. Longwitz R, van Lintel H and Renaud P 2003 Study of micro glow discharges as ion sources for ion mobility spectrometry J. Vac. Sci. Technol. 21 1570-3