Dry adhesive bonding of nanoporous inorganic membranes to microfluidic devices using the OSTE(+) dual-cure polymer

Journal of Micromechanics and Microengineering

Volumn 23, Issue 2, 2013, Pages

  Saharil, Farizah ^a   Forsberg, Fredrik ^a   Liu, Yitong ^a   Bettotti, Paolo ^b   Kumar, Neeraj ^b   Niklaus, Frank ^a   Haraldsson, Tommy ^a   Van Der Wijngaart, Wouter ^a   Gylfason, Kristinn B ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b UNIVERSITY OF TRENTO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

DEVICE FABRICATIONS; INORGANIC MEMBRANES; MICRO-FLUIDIC DEVICES; MICROFLUIDIC CIRCUIT; MICROSTRUCTURED SILICONS; POLYMER FORMULATION; POLYMERIC MICROFLUIDICS; POROUS ALUMINA MEMBRANES;

CURING; ELASTIC MODULI; FLUIDIC DEVICES; MEMBRANES; MICROFLUIDICS; POLYMERS; POROUS SILICON; SILICON; SILICON WAFERS; WAFER BONDING;

DRYING;

EID: 84877980868     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/23/2/025021     Document Type: Article

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