One step integration of gold coated sensors with OSTE polymer cartridges by low temperature dry bonding

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 2778-2781

  Sandstrom N ^a   Shafagh, R Z ^a   Carlborg, C F ^a   Haraldsson, T ^a   Stemme, G ^a   Van Der Wijngaart, W ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

Biosensor; gold; integration; microfluidics; off stoichiometry thiol ene; OSTE; packaging; QCM; quartz crystal microbalance; SPR; surface plasmon resonance; thiol

Indexed keywords

OSTE; QCM; QUARTZ CRYSTAL; SPR; SURFACE PLASMONS; THIOL; THIOL-ENES;

ACTUATORS; BIOSENSORS; CHIP SCALE PACKAGES; CURING; FUNCTIONAL GROUPS; FUNCTIONAL POLYMERS; GOLD; GOLD COATINGS; INTEGRATION; MICROSYSTEMS; PLASTIC COATINGS; PROJECTILES; QUARTZ; QUARTZ CRYSTAL MICROBALANCES; STOICHIOMETRY; SURFACE PLASMON RESONANCE;

SOLID-STATE SENSORS;

EID: 80052133989     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969534     Document Type: Conference Paper

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