P-type and N-type multi-gate polycrystalline silicon vertical thin film transistors based on low-temperature technology

Solid-State Electronics

Volumn 86, Issue , 2013, Pages 1-5

  Zhang, P ^a   Jacques, E ^a   Rogel, R ^a   Bonnaud, O ^a  

^a IETR   (France)

Author keywords

3D structure; Plasma etching; Polycrystalline silicon; Thin film transistor (TFT)

Indexed keywords

3D STRUCTURE; ELECTRICAL CHARACTERISTIC; EQUIVALENT CHANNELS; INSULATING BARRIERS; LOW TEMPERATURE TECHNOLOGY; POLYSILICON ACTIVE LAYERS; POLYSILICON LAYERS; VERTICAL THIN-FILM TRANSISTORS;

DEPOSITS; PLASMA ETCHING; TEMPERATURE; THIN FILM TRANSISTORS; THIN FILMS;

POLYSILICON;

EID: 84877782334     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2013.04.021     Document Type: Article

References (14)

1. G. Beaucarne, S. Bourdais, A. Slaoui, and J. Poortmans Thin Solid Films 403-404 2002 229 237
2. Jin-Woo Han, Seong-Wan Ryu, Dong-Hyun Kim, and Yang-Kyu Choi IEEE Trans Electron Dev 57 2010 601 607
3. J.P. Lu, K. Van Schuylenbergh, J. Ho, Y. Wang, J.B. Boyce, and R.A. Street Appl Phys Lett 80 2002 4656 4658
4. Satoshi Inoue, Sumio Utsunomiya, Takayuki Saeki, and Tatsuya Shimoda IEEE Trans Electron Dev 49 2002 1353 1360
5. Kee Chan Park, Jae-Hong Jeon, YoungIl Kimc, Jae Beom Choi, Young-Jin Chang, and ZhiFeng Zhan Solid State Electron 52 2008 1691 1693
6. Tiemin Zhao, Min Cao, Krishna C. Sarawat, and James D. Flummer IEEE Electron Dev Lett 15 1994 415 417
7. Chao Sung Lai, Chung Len Lee, Tan Fu Lei, and Horng Nan Chern IEEE Electron Dev Lett 17 1996 199 201
8. Ming-Zhen Lee, Chung-Len Lee, and Tan-Fu Lei Jpn J Appl Phys 42 2003 2123 2126
9. P. Zhang, E. Jacques, R. Rogel, N. Coulon, and O. Bonnaud Solid State Electron 79 2013 26 30
10. P. Joubert, B. Loisel, Y. Chouan, and L. Haji J Electrochem Soc 134 1987 2541 2545
11. L. Pichon, K. Mourgues, F. Raoult, T. Mohammed-Brahim, K. Kis-Sion, and D. Briand Semicond Sci Technol 16 2001 918 924
12. N.C.C. Lu, C.Y. Lu, M.K. Lee, C.C. Shih, C.S. Wang, and W. Reuter J Electrochem Soc 131 1984 897 902
13. Gael Gautier, Carlos Eduardo Viana, Samuel Crand, Regis Rogel, Nilton Itiro Morinioto, Olivier Bonnaud. In: Fourth IEEE international caracas conference on devices, Circuits and Systems: Aruba; 2002 [DO14-1-6].
14. A. Valletta, P. Gaucci, L. Mariucci, G. Fortunato, and S.D. Brotherton Appl Phys Lett 85 2004 3113 3115