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Volumn 3, Issue 4, 2013, Pages

Electronic structures of oxygen-deficient Ta2O5

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; ELECTRONIC STRUCTURE; OXYGEN; TANTALUM OXIDES; TEMPERATURE;

EID: 84877611304     PISSN: None     EISSN: 21583226     Source Type: Journal    
DOI: 10.1063/1.4800899     Document Type: Article
Times cited : (29)

References (38)
  • 1
    • 34247897179 scopus 로고    scopus 로고
    • 5 as high-k dielectric for nanoscale DRAMs
    • DOI 10.1016/j.microrel.2006.06.006, PII S0026271406001466, Modelling the Negative Bias Temperature Instability
    • E. Atanassova and A. Paskaleva, Microelectron. Reliab. 47, 913 (2007). 10.1016/j.microrel.2006.06.006 (Pubitemid 46693922)
    • (2007) Microelectronics Reliability , vol.47 , Issue.6 , pp. 913-923
    • Atanassova, E.1    Paskaleva, A.2
  • 5
    • 0021422501 scopus 로고
    • Some properties of crystallized tantalum pentoxide thin films on silicon
    • DOI 10.1063/1.332924
    • G. S. Oehrlein, F. M. d'Heurle, and A. Reisman, J. Appl. Phys. 55, 3715 (1984). 10.1063/1.332924 (Pubitemid 14607750)
    • (1984) Journal of Applied Physics , vol.55 , Issue.10 , pp. 3715-3725
    • Oehrlein, G.S.1    D'Heurle, F.M.2    Reisman, A.3
  • 15
    • 0000339470 scopus 로고    scopus 로고
    • 10.1103/PhysRevB.55.11155
    • A. Fukumoto and K. Miwa, Phys. Rev. B 55, 11155 (1997). 10.1103/PhysRevB.55.11155
    • (1997) Phys. Rev. B , vol.55 , pp. 11155
    • Fukumoto, A.1    Miwa, K.2
  • 17
    • 0242468585 scopus 로고    scopus 로고
    • 10.1063/1.1615700
    • R. Ramprasad, J. Appl. Phys. 94, 5609 (2003). 10.1063/1.1615700
    • (2003) J. Appl. Phys. , vol.94 , pp. 5609
    • Ramprasad, R.1
  • 19
    • 79961049736 scopus 로고    scopus 로고
    • 10.1103/PhysRevB.83.144105
    • Y.-N. Wu, L. Li, and H.-P. Cheng, Phys. Rev. B 83, 144105 (2011). 10.1103/PhysRevB.83.144105
    • (2011) Phys. Rev. B , vol.83 , pp. 144105
    • Wu, Y.-N.1    Li, L.2    Cheng, H.-P.3
  • 21
    • 12844286241 scopus 로고
    • 10.1103/PhysRevB.47.558
    • G. Kresse and J. Hafner, Phys. Rev. B 47, 558 (1993). 10.1103/PhysRevB.47.558
    • (1993) Phys. Rev. B , vol.47 , pp. 558
    • Kresse, G.1    Hafner, J.2
  • 22
  • 23
    • 25744460922 scopus 로고
    • 10.1103/PhysRevB.50.17953
    • P. E. Blöchl, Phys. Rev. B 50, 17953 (1994). 10.1103/PhysRevB.50. 17953
    • (1994) Phys. Rev. B , vol.50 , pp. 17953
    • Blöchl, P.E.1
  • 24
    • 0011236321 scopus 로고    scopus 로고
    • 10.1103/PhysRevB.59.1758
    • G. Kresse and D. Joubert, Phys. Rev. B 59, 1758 (1999). 10.1103/PhysRevB.59.1758
    • (1999) Phys. Rev. B , vol.59 , pp. 1758
    • Kresse, G.1    Joubert, D.2
  • 27
  • 28
    • 84877609758 scopus 로고    scopus 로고
    • See supplementary material at E-AAIDBI-3-010304 for more details on constructing the model.
    • See supplementary material at http://dx.doi.org/10.1063/1.4800899 E-AAIDBI-3-010304 for more details on constructing the model.
  • 30
    • 0242663237 scopus 로고    scopus 로고
    • 10.1002/jcc.10349
    • Y. Duan, J. Comput. Chem. 24, 1999 (2003). 10.1002/jcc.10349
    • (2003) J. Comput. Chem. , vol.24 , pp. 1999
    • Duan, Y.1
  • 31
    • 0000044129 scopus 로고    scopus 로고
    • 10.1063/1.373747
    • R. M. Fleming, J. Appl. Phys. 88, 850 (2000). 10.1063/1.373747
    • (2000) J. Appl. Phys. , vol.88 , pp. 850
    • Fleming, R.M.1
  • 34
    • 84863076112 scopus 로고    scopus 로고
    • 10.1103/PhysRevB.85.035204
    • Y. Yang, O. Sugino, and T. Ohno, Phys. Rev. B 85, 035204 (2012). 10.1103/PhysRevB.85.035204
    • (2012) Phys. Rev. B , vol.85 , pp. 035204
    • Yang, Y.1    Sugino, O.2    Ohno, T.3
  • 36
    • 84877587544 scopus 로고    scopus 로고
    • private communications
    • K. Ota, private communications.
    • Ota, K.1
  • 37
    • 0037468479 scopus 로고    scopus 로고
    • 10.1021/jp027593f
    • W.-J. Chun, J. Phys. Chem. B 107, 1798-1803 (2003). 10.1021/jp027593f
    • (2003) J. Phys. Chem. B , vol.107 , pp. 1798-1803
    • Chun, W.-J.1
  • 38
    • 79961122816 scopus 로고    scopus 로고
    • 10.1063/1.3606416
    • M. V. Ivanov, J. Appl. Phys. 110, 024115 (2011). 10.1063/1.3606416
    • (2011) J. Appl. Phys. , vol.110 , pp. 024115
    • Ivanov, M.V.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.