Graphene based piezoresistive pressure sensor

Applied Physics Letters

Volumn 102, Issue 16, 2013, Pages

  Zhu, Shou En ^a   Krishna Ghatkesar, Murali ^a   Zhang, Chao ^b   Janssen, G C A M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFERENTIAL PRESSURES; ELECTROMECHANICAL MEASUREMENTS; FINITE ELEMENT SIMULATIONS; PIEZORESISTIVE EFFECTS; PIEZORESISTIVE PRESSURE SENSORS; POLYCRYSTALLINE GRAPHENE; SILICON NITRIDE MEMBRANE; STRAIN DISTRIBUTIONS;

CHEMICAL VAPOR DEPOSITION; PRESSURE SENSORS; SILICON NITRIDE;

GRAPHENE;

EID: 84876977619     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4802799     Document Type: Article

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