Comparison of the Intrinsic Characteristics of LTCC and Silicon Pressure Sensors by Means of 1/f Noise Measurements

Radioengineering

Volumn 22, Issue 1, 2013, Pages 227-232

  Santo Zarnik, Marina ^a,b,c,d   Belavic, Darko ^a,b,c,d   Sedlakova, Vlasta ^e   Sikula, Josef ^e   Kopecky, Martin ^e   Sedlak, Petr ^e   Majzner, Jiri ^e  

^a HIPOT RR   (Slovenia)

^b INMedica   (Slovenia)

^c JO EF STEFAN INSTITUTE   (Slovenia)

^d Centre of Excellence Namaste   (Slovenia)

^e BRNO UNIVERSITY OF TECHNOLOGY   (Czech Republic)

Author keywords

Intrinsic resolution; LTCC pressure sensor; Noise spectral density

Indexed keywords

EID: 84876953081     PISSN: 12102512     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (14)

1. Belavic, D., Zarnik, M. S., Hrovat, M., Macek, S., Pavlin, M., Jerlah, M., Holc, J., Drnovšek, S., Cilensek, J., Kosec. M. Benchmarking different types of thick-film pressure sensors. In Proceedings of the IMAPS/ACerS 2007, Int. Conf. CICMT, 2007, p. 278-285.
2. Meader, T., Fahrny, V., Stauss, S., Corradini, G., Ryser, P. Design and characterisation of low-cost thick-film piezoresistive force sensors for the 100 mN to 100 N range. In Proc. Int. Conference of IMAPS Poland Chapter. Koszalin-Darlowko (Poland), 2005, p.429.
3. Zarnik, M. S., Belavic, D., Macek, S. The warm-up and offset stability of a low-pressure piezoresistive ceramic pressure sensor. Sensors and Actuators A, 2010, vol. 158, no. 2, p. 198-206.
4. Sedlakova, V., Majzner, J., Sedlak, P., Kopecky, M., Sikula, J., Zarnik, M. S., Belavic, D., Hrovat, M. Evaluation of piezoresistive ceramic pressure sensors using noise measurements. Informacije MIDEM, 2012, vol. 42, no.2, p. 109-114.
5. Rocak, D., Belavic, D., Hrovat, M., Sikula, J., Koktavy, P., Pavelka, J., Sedlakova, V. Low frequency noise of thick film resistors as quality and reliability indicator. Microelectronics Reliability, 2002, vol. 41, no. 4, p. 531-542.
6. Vidybida, A. K. Adsorption-desorption noise can be used for improving selectivity. Sensor Actuator A, 2003, vol. 107, p. 233-237.
7. Smulko, J. Electrochemical noise analysis methods for the investigation of corrosion processes. In Proc. SPIE, Noise and Information in Nanoelectronics, Sensors and Standards. Santa Fe (USA), 2-4 June 2003, vol. 5115, p. 86-91.
8. Gomri, S., Seguin, J., Guerin, J., Aguir, K. Adsorption- desorption noise in gas sensors: Modelling using Langmuir and Wolkenstein models for adsorption. Sensors & Actuators B, 2006, vol. 114, p. 451-459.
9. Hasse, L., Kotarski, M., Smulko, J., Majzner, J., Sedlakova, V., Sedlak, P., Sikula, J. Comparison of effectiveness of gas sensing by low frequency fluctuations in resistance and microbalance quartz gas sensors. In Proc. of 21st International Conference on Noise and Fluctuations (ICNF 2011). Toronto (Canada), June 12-16, 2011, p. 266-269.
10. Sedlak, P., Sikula, J., Majzner, J., Vrnata, M., Fitl, P., Kopecky, D., Vyslouzil, F., Handel, P. H. Adsorption-desorption noise in QCM gas sensors. Sensors and Actuators B-Chemical, 2012, vol. 166, p. 264-268.
11. Sikula, J., Sedlakova, V., Tacano, M., Zednicek, T. Reliability of electronic devices: Failure mechanisms and testing. Reliability, Risk and Safety: Theory and Applications, 2011, vol. 1-3, p. 1925-1936.
12. Zarnik, M. S., Belavic, D. Stability of a piezoresistive ceramic pressure sensor made with LTCC technology. In Proc. IMAPS/ACerS Conf, CICMT 2012.
13. Hrovat, M., Belavic, D., Samardzija, Z., Holc, J. A characterisation of thick film resistors for strain gauge applications. Journal of Materials Science, 2001, vol. 36, no. 11, p. 2679-2689.
14. Bae, B., Flachsbart, B. R., Park, K., Shannon, M. A. Design optimization of a piezoresistive pressure sensor considering the output signal-to noise ratio. J. Micromech Microeng, 2004, vol. 14, p. 1597-1607