Benchmarking different types of thick-film pressure sensors

International Microelectronics and Packaging Society - 3rd IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2007

Volumn , Issue , 2007, Pages 278-285

  Belavič, Darko ^a,b   Santo Zarnik, Marina ^a,b   Hrovat, Marko ^b   Maček, Srečko ^b   Pavlin, Marko ^a   Jerlah, Mitja ^a   Holc, Janez ^b   Drnovšek, Silvo ^b   Cilenšek, Jena ^b   Kosec, Marija ^b  

^a HIPOT RandD   (Slovenia)

^b JO EF STEFAN INSTITUTE   (Slovenia)

Author keywords

Ceramic material; Pressure sensors; Sensors; Thick film

Indexed keywords

DIFFERENT SUBSTRATES; MOVABLE ELECTRODES; PIEZORESISTIVE PRESSURE SENSORS; RESONANT PRESSURE SENSORS; SENSORS AND TRANSDUCERS; THICK FILM RESISTORS; THICK-FILM TECHNOLOGY; WORKING PRINCIPLES;

ALUMINA; CERAMIC MATERIALS; DIAPHRAGMS; MICROELECTRONICS; MICROSYSTEMS; NATURAL FREQUENCIES; PIEZOELECTRIC ACTUATORS; RESISTORS; SENSORS; TECHNOLOGY; THICK FILMS;

PRESSURE SENSORS;

EID: 84878215538     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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