Evaluation of piezoresistive ceramic pressure sensors using noise measurements

Informacije MIDEM

Volumn 42, Issue 2, 2012, Pages 109-114

  Sedlakova, Vlasta ^a   Majzner, Jiri ^a   Sedlak, Petr ^a   Kopecky, Martin ^a   Sikula, Josef ^a   Zarnik, Marina Santo ^b,d   Belavic, Darko ^b,d   Hrovat, Marko ^c,d  

^a BRNO UNIVERSITY OF TECHNOLOGY   (Czech Republic)

^b HIPOT RR   (Slovenia)

^c JO EF STEFAN INSTITUTE   (Slovenia)

^d Centre of Excellence Namaste   (Slovenia)

Author keywords

LTCC; Noise Spectral density; Resolution; Sensitivity

Indexed keywords

EID: 84869173831     PISSN: 03529045     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (6)

1. rd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT 2007), Denver, Colorado, USA, 23-26 April 2007, pp. 278-285.
2. th European Microelectronics and Packaging Conference & Exhibition (EMPC 2007), Oulu, Finland, 17 - 20 June 2007, pp. 381-388
3. M. S. Zarnik, D. Belavič, S. Maček. "The warm-up and offset stability of a low-pressure piezoresistive ceramic pressure sensor,", Sensors and actuators, A, Vol. 158, no. 2, pp. 198-206, 2010.
4. J. Sikula, J. Pavelka, D. Rocak, D. Belavic. "Low Frequency Noise in Film Resistors (invited),", VII. Van der Ziel Symposium on Quantum 1/f Noise and Other Low Frequency Fluctuations in Electronic Devices, AIP Woodbury NY p. 42 (1998).
5. D. Rocak, D. Belavic, M. Hrovat, J. Sikula, P. Koktavy, J. Pavelka, V. Sedlakova. "Low Frequency Noise of Thick Film Resistors as Quality and Reliability Indicator,", Microelectronics Reliability, 2002, vol. 41, No. 4, s. 531-542. ISSN: 0026-2714.
6. M. Hrovat, D. Belavic, J. Kita, J Holc, S Drnovšek, J. Cilenšek, J. Golonka, A. Dziedzic. "Thick-film strain and temperature sensors on LTCC substrates,". Microelectron. int., 2006, vol. 23, pp. 33-41. (Pubitemid 44149361)