Development of a sinusoidal phase-shifting self-mixing interferometer for real-time displacement measurement with nanometer accuracy

Measurement Science and Technology

Volumn 24, Issue 5, 2013, Pages

  Xia, Wei ^a   Yang, Zhenyu ^a   Liu, Qiang ^a   Wang, Ming ^a   Hao, Hui ^a   Guo, Dongmei ^a  

^a NANJING NORMAL UNIVERSITY   (China)

Author keywords

displacement measurement; laser interferometer; phase shifting; self mixing interference

Indexed keywords

INTERFEROMETERS; INTERFEROMETRY; LASER INTERFEROMETRY; MIXING; MODULATORS; PHASE SHIFT;

DUAL-FREQUENCY INTERFEROMETER; ELECTRO-OPTIC MODULATORS; LASER INTERFEROMETER; PHASE-SHIFTING; PHASE-SHIFTING TECHNIQUE; SELF MIXING INTERFERENCE; SELF MIXING INTERFEROMETRY; SELF-MIXING INTERFEROMETERS;

DISPLACEMENT MEASUREMENT;

EID: 84876699957     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/24/5/055011     Document Type: Article

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