MEMS accelerometer embedded in a self-mixing displacement sensor for parasitic vibration compensation

Optics Letters

Volumn 36, Issue 5, 2011, Pages 612-614

  Zabit, Usman ^a   Bernal, Olivier D ^a   Bosch, Thierry ^a   Bony, Francis ^a  

^a LAAS CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DISPLACEMENT MEASUREMENTS; DISPLACEMENT SENSOR; EMBEDDED APPLICATION; LASER DISPLACEMENT SENSORS; LASER HEADS; LOW NOISE; MEMS ACCELEROMETER; MICROELECTROMECHANICAL SYSTEM ACCELEROMETERS; NOISE CHARACTERISTIC; NONSTATIONARY; SELF-MIXING; SYSTEM RESOLUTION; VIBRATION COMPENSATION;

COMPOSITE MICROMECHANICS; MEMS; MICROELECTROMECHANICAL DEVICES; SENSORS;

ACCELEROMETERS;

EID: 79952356439     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.36.000612     Document Type: Article

References (3)

1. G. Giuliani, M. Norgia, S. Donati, and T. Bosch, J. Opt. A 4, 283(2002).
2. C. Bes, G. Plantier, and T. Bosch, IEEE Trans. Instrum. Meas. 55, 1101(2006).
3. S. Donati, M. Norgia, and G. Giuliani, Appl. Opt. 45, 7264(2006).