Design of error-compensating algorithms for sinusoidal phase shifting interferometry

Applied Optics

Volumn 48, Issue 35, 2009, Pages 6788-6796

  De Groot, Peter ^a  

^a ZYGO CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ERRORS; INTERFEROMETRY;

COMPUTATIONALLY EFFICIENT; DESIGN PRINCIPLES; ERROR COMPENSATING; HARMONIC COMPONENTS; INTERFERENCE SIGNAL; OPTICAL SOCIETY OF AMERICA; PHASE ESTIMATION ALGORITHMS; PHASE SHIFTING INTERFEROMETRY;

PHASE SHIFT;

EID: 73649133991     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.48.006788     Document Type: Article

References (13)

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