Optical H2 sensing properties of vertically aligned Pd/WO 3 nanorods thin films deposited via glancing angle rf magnetron sputtering

Sensors and Actuators, B: Chemical

Volumn 182, Issue , 2013, Pages 795-801

  Wisitsoorat, A ^a   Ahmad, M Z ^b,d   Yaacob, M H ^c   Horpratum, M ^a   Phakaratkul, D ^a   Lomas, T ^a   Tuantranont, A ^a   Wlodarski, W ^b  

^a NATIONAL ELECTRONICS AND COMPUTER TECHNOLOGY CENTER   (Thailand)

^b RMIT UNIVERSITY   (Australia)

^c UNIVERSITY PUTRA MALAYSIA   (Malaysia)

^d Mechanisation and Automation Research Center   (Malaysia)

Author keywords

Glancing angle deposition; Nanorods H2 sensor; Optical gas sensor; Tungsten trioxide

Indexed keywords

CONVENTIONAL SPUTTERING; FIELD EMISSION SCANNING; GRAZING INCIDENCE X-RAY DIFFRACTION; LOW OPERATING TEMPERATURE; MONOCLINIC CRYSTAL STRUCTURE; OPTICAL GAS SENSORS; RF-MAGNETRON SPUTTERING; TUNGSTEN TRIOXIDE;

CHEMICAL SENSORS; DEPOSITS; FILM PREPARATION; MAGNETRON SPUTTERING; QUARTZ; X RAY DIFFRACTION;

NANORODS;

EID: 84876696053     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2013.03.091     Document Type: Article

References (22)

1. 3 thin-film sensors Sensors and Actuators B 105 2 2005 271 277
2. 3 for electrochromic and related applications Solar Energy Materials and Solar Cells 92 2008 245 258 (Pubitemid 350103757)
3. M. Ando, R. Chabicovsky, and M. Haruta Optical hydrogen sensitivity of noble metal tungsten oxide composite films prepared by sputtering deposition Sensors and Actuators B: Chemical 76 1-3 2001 13 17 (Pubitemid 32513852)
4. H. Shanak Fast coloration in sputtered gasochromic tungsten oxide films Physica Status Solidi A: Applied Research 203 15 2006 3748 3753 (Pubitemid 46034549)
5. 2 Sensors and Actuators B 137 2009 115 120
6. 3 composite thin films as sensing materials for optical fiber hydrogen sensors Sensors and Actuators B 143 2010 750 753
7. 3 gas sensors prepared by thermal oxidization of tungsten Sensors and Actuators B 133 2008 321 326
8. 3 nanoparticles for acetone selective detection Chemistry of Materials 20 2008 4794 4796
9. 3 nanostructures produced with hot-wire chemical vapor deposition Thin Solid Films 517 12 2009 3596 3599
10. 3 nanorods/nanobelts synthesized via physical vapor deposition process Chemical Physics Letters 367 1-2 2003 214 218
11. K. Robbie, and M.J. Brett Sculptured thin films and glancing angle deposition: growth mechanics and applications Journal of Vacuum Science and Technology A 15 3 1997 1460 1465 (Pubitemid 127082573)
12. Y.-P. Zhao, D.-X. Ye, G.-C. Wang, and T.-M. Lu Designing nanostructures by glancing angle deposition SPIE Proceedings 5219 2003 59 73
13. D. Deniz, D.J. Frankel, and R.J. Lad Nanostructured tungsten and tungsten trioxide films prepared by glancing angle deposition Thin Solid Films 518 2010 4095 4099
14. D. Deniz, and R.J. Lad Temperature threshold for nanorod structuring of metal and oxide films grown by glancing angle deposition Journal of Vacuum Science and Technology A 29 2011 011020
15. 3 pillar-type and helical-type thin film structures to be used in microbatteries Journal of Power Sources 172 2007 422 427 (Pubitemid 47418502)
16. 3 nanorods/films prepared by oblique angle deposition Journal of Vacuum Science and Technology B 25 2007 1875 1881 (Pubitemid 350255808)
17. D. Vick, L.J. Friedrich, S.K. Dew, M.J. Brett, K. Robbie, M. Seto, and T. Smy Self-shadowing and surface diffusion effects in obliquely deposited thin films Thin Solid Films 339 1999 88 94
18. 2 gas detection Thin Solid Films 515 2007 8351 8355 (Pubitemid 47410241)
19. J. Gospodyn, and J. Slit Characterization of dielectric columnar thin film by variable angle Mueller matrix and spectroscopic ellipsometry Optical Materials 29 2006 318 325 (Pubitemid 44604328)
20. J.Q. Xi, J.K. Kim, and E.F. Schubert Silica nanorod-array films with very low refractive indices Nano Letters 5 2005 1385 1387 (Pubitemid 41084421)
21. 2 gas sensing Journal of Materials Chemistry 22 2012 8525 8531
22. T. He, and J. Yao Photochromic materials based on tungsten oxide Journal of Materials Chemistry 17 2007 4547 4557 (Pubitemid 350037096)