Sensitivity analysis of nanoparticles pushing manipulation by AFM in a robust controlled process

Precision Engineering

Volumn 37, Issue 3, 2013, Pages 658-670

  Omidi, E ^a   Korayem, A H ^a   Korayem, M H ^a  

^a IRAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Iran)

Author keywords

Atomic force microscope; Dynamic friction; Nanomanipulation; Piezoelectric actuator; Sensitivity analysis; Sliding mode control

Indexed keywords

ATOMIC FORCE MICROSCOPE (AFM); DESIRED TRAJECTORIES; DYNAMIC FRICTION; MICRO/NANOMANIPULATION; NANOMANIPULATIONS; NANOPARTICLE MANIPULATION; PIEZOELECTRIC SUBSTRATES; REAL TIME VISUALIZATION;

ATOMIC FORCE MICROSCOPY; DYNAMIC MODELS; FRICTION; MICROMANIPULATORS; NANOPARTICLES; NANOTECHNOLOGY; PIEZOELECTRIC ACTUATORS; SENSITIVITY ANALYSIS; SLIDING MODE CONTROL; SLIP FORMING;

PROCESS CONTROL;

EID: 84876667197     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2013.01.011     Document Type: Article

References (21)

1. A.A.G. Requicha Nanorobotics S. Nof, Handbook of industrial robotics 2nd ed. 1999 John Wiley & Sons New York 199 210
2. M.R. Falvo, R.M. Taylor, and A. Helser Nanometer-scale rolling and sliding of carbon nanotubes Nature 397 1999 236 238 (Pubitemid 29051167)
3. M. Sitti, and H. Hashimoto Controlled pushing of nanoparticles: modeling and experiments IEEE Transactions on Mechatronics 5 2 2000 199 211
4. A. Tafazzoli, and M. Sitti Dynamic behavior and simulation of nanoparticles sliding during nanoprobe-based positioning Proceedings of the ASME international mechanical engineering congress Anaheim, CA, USA, November 2004
5. M.H. Korayem, and M. Zakeri Sensitivity analysis of nanoparticles pushing critical conditions in 2-D controlled nanomanipulation based on AFM Journal of Advanced Manufacturing Technology 41 7 2009 714 726
6. H. Babahosseini, S.H. Mahboobi, and A. Meghdari Dynamics modeling of nanoparticle in AFM-based manipulation using two nanoscale friction models Proceedings of the ASME international mechanical engineering congress Lake Buena Vista, FL, USA, November 2009
7. F. Landolsi, and F.H. Ghorbel Nanoscale friction dynamic modeling Journal of Dynamic Systems Measurement and Control 131 6 2009 061102-1 061102-7
8. J.A. Turner, S. Hirsekorn, U. Rabe, and W. Arnold High frequency response of atomic force microscope cantilevers Journal of Applied Physics 82 3 1977 966 979
9. J.E. Sader, and C.P. Green In-plane deformation of cantilever plates with applications to lateral force microscopy Review of Scientific Instruments 75 4 2004 878 884
10. J.M. Neumeister, and W.A. Ducked Lateral, normal, and longitudinal spring constants of atomic force microscopy cantilevers Review of Scientific Instruments 65 8 1994 2527 2532
11. R.W. Stark, G. Schitter, and A. Stemmer Tuning the interaction forces in tapping mode atomic force microscopy Physical Review B 68 8 2003 085401-1 085401-5
12. M. Nosonovsky, and B. Bhushan Multiscale friction mechanisms and hierarchical surfaces in nano- and bio-tribology Journal of Materials Science and Engineering 58 3-5 2007 162 193 (Pubitemid 350051886)
13. Y.M. Fathi, H. Ghorbel, and J.B. Dabney Nanomanipulation modeling and simulation Proceedings of the ASME international mechanical engineering congress Chicago, IL, USA, November 2006
14. F. Landols, F.H. Ghorbel, and J.B. Dabney An AFM-based nanomanipulation model describing the atomic two dimensional stick-slip behavior Proceedings of the ASME international mechanical engineering congress Seattle, Washington, USA, November 2007
15. B. Bhushan Handbook of micro/nano tribology. The mechanics and materials science series 2nd ed. 1999 CRC Press Boca Raton, FL
16. H.Ch. Liaw, and B. Shirinzadeh Robust adaptive constrained motion tracking control of piezo-actuated flexure-based mechanisms for micro/nano manipulation IEEE Transactions on Industrial Electronics 58 4 2011 1406 1415
17. F.E. Thau Observing the states of nonlinear dynamic systems International Journal of Control 17 3 1973 471 479
18. T.S. Low, and W. Guo Modeling of a three-layer piezoelectric bimorph beam with hysteresis Journal of Microelectromechanical Systems 4 4 1995 230 237
19. Q. Yang, S. Jagannathan, and E.W. Bohannan Automatic drift compensation using phase correlation method for nanomanipulation IEEE Transactions on Nanotechnology 7 2 2008 209 216 (Pubitemid 351436455)
20. B. Mokaberi, and A.A.G. Requicha Drift compensation for automatic nanomanipulation with scanning probe microscopes IEEE Transactions on Automation Science and Engineering 3 3 2006 199 207 (Pubitemid 44121549)
21. J.J.E. Slotine, and W. Li Applied nonlinear control 1991 Prentice Hall Englewood Cliffs, New Jersey