Dynamic behavior and simulation of nanoparticle sliding during nanoprobe-based positioning

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 73, Issue 2 PART B, 2004, Pages 965-972

  Tafazzoli, Afshin ^a   Sitti, Metin ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; ELASTIC MODULI; FEEDBACK CONTROL; MATHEMATICAL MODELS; POSITION MEASUREMENT; SILICON; STIFFNESS; SUBSTRATES; TRIBOLOGY;

NANOPARTICLE MANIPULATION; NANOPARTICLE SLIDING; NANOPROBE-BASED POSITIONING; SILICON SUBSTRATES;

NANOSTRUCTURED MATERIALS;

EID: 19644386491     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2004-62470     Document Type: Conference Paper

References (32)

1. Ashhab, M., Salapaka, M. V., Dahleh, M., and Mezic, I., "Dynamic Analysis and Control of Microcantilevers", Automatica, Vol. 35, No. 10, pp. 1663-1670, 1999.
2. Bhushan, B., Introduction to Tribology, John Wiley & Sons, New York, 2002.
3. Brilliantov, N. V., and Poschel T., "Rolling as a Continuing Collision", The European Physical Journal B, Vol. 12, pp. 299-301, 1999.
4. Butt H., "A Technique for Measuring the Force Between a Colloidal Particle in Water and a Bubble", J. Colloidal and Interface Science, Vol. 166, pp. 109-117, 1994.
5. Carpick, R. W., Agrait, N., Ogletree, D. F., and Salmeron, M., "Variation of the Interfacial Shear Strength and Adhesion of a Nanometer-Sized Contact", Langmuir, Vol. 12, pp. 3334-3340, 1996.
6. Chen, J., Workman, R. K., Sarid, D., and Hooper, R., "Numerical Simulation of a Scanning Force Microscope with a Large-Amplitude Vibrating Cantilever", Nanotechnology, Vol. 5, pp. 199-204, 1994.
7. Dedkov, G., "Friction on the Nanoscale: New Physical Mechanism", Meterials Letters, Vol. 38, pp. 360-366, 1999.
8. Falvo, M. R., and Superfine, R., "Mechanics and Friction at the Nanometer Scale", J. Nanoparticle, Res. 2, pp. 237-248, 2000.
9. Falvo, M. R., Taylor, R. M., Helser, A., Chi, V., Brooks Jr, F. P., Washburn, S., and Superfine, R., "Nanometre-Scale Rolling and Sliding of Carbon Nanotubes", Nature, Vol. 397, pp. 236-238, 1999.
10. Fearing, R.S., "Survey of Sticking Effects for Micro Parts Handling", Proc. of IEEE MEMS, pp. 212-217, 1995.
11. Hansen, L. T., Kuhle, A., Sorensen, A. H., Bohr, J., and Lindelof, P. E., "A Technique for Positioning Nanoparticles Using an Atomic Force Microscope", Nanotechnology, Vol. 9, pp. 337-342, 1998.
12. Heim, L., Blum, J., Preuss, M., and Butt, H., "Adhesion and Friction Forces between Spherical Micrometer-Sized Particles", Physical Review Letters, Vol. 83, No. 16, pp. 3328-3331, 1999.
13. nd Edition, 1992.
14. Johnson, K. L., "The Contribution of micro/nano-tribology to the interpretation of dry friction", Proc. of IMechE, Vol. 214, Part C, 2000.
15. Johnson, K. L., Contact Mechanics. Cambridge University, London, 1985.
16. Junno, T., Deppert, K., Montelius, L., and Samuelson, L., "Controlled Manipulation of Nanoparticles with an Atomic Force Microscope", Appl. Physics Letters, Vol. 66, pp. 3627-3629, June 1995.
17. Laxminarayana, K., and Jalili, N., "A Review of Recent Developments in Atomic Force Microscopy Systems with Application to Manufacturing and Biological Processes", Proc. of IMECE, Washington, USA, November 2003.
18. Meyer, E., Overney, R. M., Dransfeld K., and Gyalog, T., "Nanoscience: Friction and Rheology on the Nanometer Scale", World Scientific Pub., Singapore, 1998.
19. Miyazaki, H., and Sato, T., "Mechanical Assembly of Three-Dimensional Microstructures from Fine Particles", Advanced Robotics, Vol. 11, No. 2, pp. 169-185, 1997.
20. Ramachandran, T. R., Baur, C., Bugacov, A., and et al., "Direct and Controlled Manipulation of Nanometer-Sized Particles Using the Nan-Contact Atomic Force Microscope", Nanotechnology, Vol. 9, pp. 237-245, 1998.
21. Saito, S., Miyazaki, H. T., Sato, T., Takahashi, K., "Kinematics of Mechanical and Adhesional Micromanipulation under a Scanning Electron Microscope", Journal of Applied Physics, Vol. 92, No. 9, pp. 5140-5149, 2002.
22. Saito, S., Miyazaki, H. T., and Sato, T., "Micro-object Pick and Place Operation under SEM based on Micro-Physics", J. Robotics and Mechatronics, Vol. 14, No. 3, pp. 227-237, 2002.
23. Salapaka, S., and Dahleh, M., "A Model for Friction in Atomic Force Microscopy", Proc. of the American Control Conf., Chicago, USA, June 2000.
24. Schafer, D., Reifenberger, R., Patil, A., and Andres, R., "Fabrication of Two-dimensional Arrays of Nanometer-Size Clusters with the Atomic Force Microscope", Appl. Physics Letters, Vol. 66, pp. 1012-1014, 1995.
25. Sitti, M., "Teleoperated and Automatic Manipulation Systems Using Atomic Force Microscope Probes", Proc. of IMECE, Washington, USA, November 2003.
26. Sitti, M., "Atomic Force Microscope Probe Based Controlled Pushing for Nano-Tribological Characterization", IEEE/ASME Transaction on Mechatronics, Vol. 9, No. 2, June 2004 (to appear).
27. Sitti, M., and Hashimoto, H., "Teleoperated Touch Feedback from the Surfaces at the Nanoscale: Modeling and Experiments", IEEE/ASME Transactions on Mechatronics, Vol. 8, No. 1, March 2003.
28. Sitti, M., and Hashimoto, H., "Controlled Pushing of Nanoparticles: Modeling and Experiments", IEEE/ASME Transactions on Mechatronics, Vol. 5, No. 2, June 2000.
29. Sitti, M., and Hashimoto, H., "Two-Dimensional Fine Particle Positioning under Optical Microscope using a Piezoresistive Cantilever as a Manipulator", Journal of Micromechatronics, Vol. 1, No. 1, pp. 25-48, 2000.
30. Soltani, M., and Ahmadi, G., "Particle Removal Mechanisms under Substrate Acceleration", Journal of Adhesion, Vol. 44, pp. 161-175, 1994.
31. th IEEE Conf. in Nanotechnology, Munich, Germany, August 2004 (to appear).
32. Zesch, W., and Fearing, R. S., "Alignment of Microparts Using Force Controlled Pushing", SPIE Conf. on Microrobotics and Micromanipulation, Boston, USA, November 1998.