SCOPUS 정보 검색 플랫폼

Volumn 425, Issue PART 15, 2013, Pages

Al/Zr multilayer mirror and its thermal stability for EUV application

(11) Zhong, Qi a Zhang, Zhong a Li, Wenbin a Zhu, Jingtao a Wang, Zhanshan a Jonnard, Philippe b Guen, Karine Le b Yuan, Yanyan b André, Jean Michel b Zhou, Hongjun c Huo, Tonglin c

a TONGJI UNIVERSITY (China)

b SORBONNE UNIVERSITÉ (France)

c UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA (China)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COATINGS; AMORPHOUS MATERIALS; MULTILAYERS; NANOCOMPOSITES; POLYCRYSTALLINE MATERIALS; REFLECTION; SYNCHROTRON RADIATION; SYNCHROTRONS; TIN OXIDES; VACUUM FURNACES; X RAY DIFFRACTION;

ANNEALED SAMPLES; DIRECT CURRENT MAGNETRON SPUTTERING; EUV REFLECTIVITY; FLUORINE DOPED TIN OXIDE; INTERFACIAL ROUGHNESS; MULTI-LAYER MIRRORS; POLYCRYSTALLINE; X RAY REFLECTION;

ALUMINUM;

EID: 84876263230 PISSN: 17426588 EISSN: 17426596 Source Type: Conference Proceeding
DOI: 10.1088/1742-6596/425/15/152010 Document Type: Conference Paper

Times cited : (7)

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