Black silicon: Substrate for laser 3D micro/nano-polymerization

Optics Express

Volumn 21, Issue 6, 2013, Pages 6901-6909

  Žukauskas, Albertas ^a   Malinauskas, Mangirdas ^a   Kadys, Arunas ^a   Gervinskas, Gediminas ^b   Seniutinas, Gediminas ^b   Kandasamy, Sasikaran ^c   Juodkazis, Saulius ^b  

^a VILNIUS UNIVERSITY   (Lithuania)

^b SWINBURNE UNIVERSITY OF TECHNOLOGY   (Australia)

^c MELBOURNE CENTRE FOR NANOFABRICATION   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ELECTRIC CONDUCTIVITY; INTERFACES (MATERIALS); PLASMA ETCHING; REFLECTION; SILICON; SUBSTRATES; THREE DIMENSIONAL COMPUTER GRAPHICS;

DIRECT LASER WRITING; ELECTRICAL CONDUCTIVITY; ELECTRICALLY CONDUCTIVE; IRRADIATION CONDITIONS; LASER POLYMERIZATION; METALLIC CONDUCTIVITY; OPTICAL REFLECTIVITY; SUPPORT STRUCTURES;

POLYMERIZATION;

NANOPARTICLE; POLYMER; SILICON;

ARTICLE; CHEMISTRY; LASER; MATERIALS TESTING; METHODOLOGY; MOLECULAR IMPRINTING; RADIATION EXPOSURE; ULTRASTRUCTURE;

LASERS; MATERIALS TESTING; MOLECULAR IMPRINTING; NANOPARTICLES; POLYMERS; SILICON;

EID: 84875736871     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.21.006901     Document Type: Article

References (25)

1. Y. Hanada, K. Sugioka, H. Kawano, I. S. Ishikawa, A. Miyawaki, and K. Midorikawa, "Nano-aquarium for dynamic observation of living cells fabricated by femtosecond laser direct writing of photostructurable glass," Biomed. Microdev. 10, 403-410 (2008).
2. Y. Hanada, K. Sugioka, I. Shihira-Ishikawa, H. Kawano, A. Miyawaki, and K. Midorikawa, "3D microfluidic chips with integrated functional microelements fabricated by a femtosecond laser for studying the gliding mechanism of cyanobacteria," Lab Chip. 11, 2109-2115 (2011).
3. D. Day, K. Pham, M. J. Ludford-Menting, J. Oliaro, D. Izon, S. Russell, and M. Gu, "A method for prolonged imaging of motile lymphocytes," Immunol. Cell. Biol. 87, 154-158 (2009).
4. M. Malinauskas, H. Gilbergs, A. ? Zukauskas, K. Belazaras, V. Purlys, M. Rutkauskas, G. Bičkauskait?e, D. Paipulas, R. Gadonas, A. Piskarskas, M. Farsari, and S. Juodkazis, "Femtosecond laser polymerization of hybrid/ integrated micro-optical elements and their characterization," J. Opt. 12, 124010 (2010).
5. K. Pham, R. Shimoni, M. J. Ludford-Menting, C. J. Nowell, P. Lobachevsky, Z. Bomzon, M. Gu, T. P. Speed, C. J. McGlade, and S. M. Russell, "Divergent lymphocyte signalling revealed by a powerful new tool for analysis of time-lapse microscopy," Immunol. Cell Biol. doi:10.1038/icb.2012.49 (2012 (in press)).
6. C. Reinhardt, S. Passinger, B. Chichkov, C. Marquart, I. Radko, and S. Bozhevolnyi, "Laser-fabricated dielectric optical components for surface plasmon polaritons," Opt. Lett. 31, 1307-1309 (2006).
7. S. Rekstyte, A. Zukauskas, V. Purlys, Y. Gordienko, and M. Malinauskas, "Direct laser writing of 3D micro/ nanostructures on opaque surfaces," Proc. SPIE 8431, 843123 (2012).
8. T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, "A novel femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals," Appl. Phys. Lett. 79, 725-727 (2001).
9. H. Jansen, M. de Boer, R. Legtenberg, and M. Elwenspoek, "The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control," J. Micromech. Microeng. 5, 115-120 (1995).
10. J. Pezoldt, T. Kups, M. Stubenrauch, and M. Fischer, "Black luminescent silicon," Physica Status Solidi (c) 8, 1021-1026 (2011).
11. A. Ovsianikov, J. Viertl, B. Chichkov, M. Oubaha, B. MacCraith, I. Sakellari, A. Giakoumaki, D. Gray, M. Vamvakaki, M. Farsari, and C. Fotakis, "Ultra-low shrinkage hybrid photosensitive material for two-photon polymerization microfabrication," ACS Nano 2, 2257-2262 (2008).
12. M. Malinauskas, A. ? Zukauskas, G. Bičkauskait?e, R. Gadonas, and S. Juodkazis, "Mechanisms of threedimensional structuring of photo-polymers by tightly focussed femtosecond laser pulses," Opt. Express 18, 10209-10221 (2010).
13. M. Malinauskas, V. Purlys, M. Rutkauskas, A. Gaidukevičiut?e, and R. Gadonas, "Femtosecond visible light induced two-photon photopolymerization for 3D micro/nanostructuring in photoresists and photopolymers," Lith. J. Phys. 50, 201-208 (2010).
14. K. Ho, C. Chan, C. Soukoulis, R. Biswas, and M. Sigalas, "Photonic band gaps in three dimensions: new layerby- layer periodic structures," Sol. Stat. Comm. 89, 413-416 (1994).
15. V. Mizeikis, S. Juodkazis, R. Tarozait?e, J. Juodkazyt?e, K. Juodkazis, and H. Misawa, "Fabrication and properties of metalo-dielectric photonic crystal structures for infrared spectral region," Opt. Express 15, 8454-8464 (2007).
16. I. Sakellari, E. Kabouraki, D. Gray, V. Purlys, C. Fotakis, A. Pikulin, N. Bityurin, M. Vamvakaki, and M. Farsari, "Diffusion-assisted high resolution direct femtosecond laser writing," ACS Nano 27, 2302-2311 (2012).
17. K. Ueno, S. Juodkazis, T. Shibuya, V. Mizeikis, Y. Yokota, and H. Misawa, "Nano-particle-enhanced photopolymerization," J. Phys. Chem. C 113, 11720-11724 (2009).
18. A. Ranella, M. Barberoglou, S. Bakogianni, C. Fotakis, and E. Stratakis, "Tuning cell adhesion by controlling the roughness and wettability of 3D micro/nano silicon structures," Acta Biomaterialia 6, 2711-2720 (2010).
19. S. Juodkazis, V. Mizeikis, K. K. Seet, H. Misawa, and U. G. K. Wegst, "Mechanical properties and tuning of three-dimensional polymeric photonic crystals," Appl. Phys. Lett. 91, 241904 (2007).
20. T. Kondo, S. Juodkazis, and H. Misawa, "Reduction of capillary force for high-aspect ratio nanofabrication," Appl. Phys. A 81, 1583-1586 (2005).
21. T.-H. Her, R. J. Finlay, C. Wu, S. Deliwala, and E. Mazur, "Microstructuring of silicon with femtosecond laser pulses," Appl. Phys. Lett. 73, 1673-1675 (1998).
22. P. G. Maloney, P. Smith, V. King, C. Billman, M.Winkler, and E. Mazur, "Emissivity of microstructured silicon," Appl. Opt. 49, 1065 - 1068 (2010).
23. H. Jin and G. L. Liu, "Fabrication and optical characterization of light trapping silicon nanopore and nanoscrew devices," Nanotechnology 23, 125202 (2012).
24. L. Taylor, T. Kirchner, N. Lavrik, and M. Sepaniak, "Surface enhanced raman spectroscopy for microfluidic pillar arrayed separation chips," Analyst 137, 1005-1012 (2012).
25. K. Juodkazis, J. Juodkazyt?e, P. Kalinauskas, E. Jelmakas, and S. Juodkazis, "Photoelectrolysis of water: Solar hydrogen - achievements and perspectives," Opt. Express 18, A147-A160 (2010).