Femtosecond visible light induced two-photon photopolymerization for 3D micro/nanostructuring in photoresists and photopolymers

Lithuanian Journal of Physics

Volumn 50, Issue 2, 2010, Pages 201-207

  Malinauskas, M ^a   Purlys, V ^a   Rutkauskas, M ^a   Gaidukeviciute A ^a   Gadonas, R ^a  

^a VILNIUS UNIVERSITY   (Lithuania)

Author keywords

Laser processing; Micro nanofabrication; Photopolymerization; Three dimensional structures; Tissue engineering; Two photon absorption

Indexed keywords

EID: 77956940244     PISSN: 16488504     EISSN: None     Source Type: Journal    
DOI: 10.3952/lithjphys.50203     Document Type: Article

References (14)

1. S. Wu, J. Serbin, and M. Gu, Two-photon polymerisation for three-dimensional micro-fabrication, J. Pho-tochem. Photobiol. A 181(1), 1-11 (2006).
2. S. H. Park, K. H. Kim, T. W. Lim, D. Y. Yang, and K. S. Lee, Investigation of three-dimensional pattern collapse owing to surface tension using an imperfection finite element model, Microelectron. Eng. 85, 432-439 (2008).
3. S. Kawata, H. B. Sun, T. Tanaka, and K. Takada, Finer features for functional microdevices, Nature 412, 697-698 (2001).
4. S. Juodkazis, V. Mizeikis, K. K. Seet, M. Mima, and H. Misawa, Two-photon lithography of nanorods in SU-8 photoresist, Nanotechnology 16, 846-849 (2005).
5. B. N. Chichkov, J. Koch, A. Ovsianikov, S. Passinger, C. Reinhardt, and J. Serbin, Direct-write micro-and nanostructuring with femtosecond lasers, Mater. Res. Soc. Symp. Proc. 850, 251-258 (2005).
6. L. Li and J. T. Fourkas, Multiphoton polymerization, Mater. Today 10(6), 30-37 (2007).
7. W. Haske, V. W. Chen, J. M. Hales, W. Dong, S. Barlow, S. R. Marder, and J. W. Perry, 65 nm feature sizes using visible wavelength 3-D multiphoton lithography, Opt. Express 15(6), 3426-3436 (2007).
8. M. Farsari, G. Filippidis, and C. Fotakis, Fabrication of three-dimensional structures by three-photon polymerization, Opt. Lett. 30(23), 3180-3182 (2005).
9. K.-S. Lee, R. H. Kim, D.-Y. Yang, and S. H. Park, Advances in 3D nano/micro-fabrication using two-photon initiated polymerization, Progr. Polymer Sci. 33, 631-681 (2008).
10. www.sartomer.com/proddetail.asp?plid=1&sgid=4&prid=SR368 (2008-07-09).
11. www.sigmaaldrich.com/Area-of-Interest/Chemistry/Materials-Science/ Polymerization-Tools/Initiators.html (2008-07-10).
12. www.microresist.de/poster-ormocerpdf (2006-05-13).
13. www.microchem.com/products/pdf/SU8-2002-2025pdf (2007-05-04).
14. H. B. Sun and S. Kawata, Two-photon photopolymer-ization and 3D lithographic microfabrication, in: NMR. 3D Analysis. Photopolymerization, Adv. Polymer Sci. 170, 169-273 (2004).