Ozone gas sensor based on nanocrystalline SrTi1-xFe xO3 thin films

Sensors and Actuators, B: Chemical

Volumn 181, Issue , 2013, Pages 919-924

  Mastelaro, Valmor R ^a   Zílio, Sérgio C ^a   Da Silva, Luis F ^a   Pelissari, Pedro I ^a   Bernardi, Maria I B ^a   Guerin, Jacques ^b   Aguir, Khalifa ^b  

^a UNIVERSITY OF SÃO PAULO   (Brazil)

^b AIX MARSEILLE UNIVERSITÉ   (France)

Author keywords

Electron beam evaporation; Nanostructure; Ozone gas sensor; SrTi1 xFexO3 thin films

Indexed keywords

AMORPHOUS THIN FILMS; ELECTRICAL RESISTANCE MEASUREMENT; ELECTRON BEAM EVAPORATION; ELECTRON BEAM-PHYSICAL VAPOR DEPOSITION; EX-SITU ANNEALING; LOW TEMPERATURES; NANOCRYSTALLINES; OZONE GAS;

AMORPHOUS MATERIALS; ATOMIC FORCE MICROSCOPY; CHEMICAL SENSORS; ELECTRON BEAMS; GAS DETECTORS; NANOSTRUCTURES; OXIDE FILMS; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS; THIN FILMS; X RAY DIFFRACTION;

OZONE;

EID: 84875423099     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2013.02.068     Document Type: Article

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