Iron-doped indium oxide by modified RGTO deposition for ozone sensing

Sensors and Actuators, B: Chemical

Volumn 118, Issue 1-2, 2006, Pages 221-225

  Baratto, Camilla ^a   Ferroni, Matteo ^a   Faglia, Guido ^a   Sberveglieri, Giorgio ^a  

^a UNIVERSITY OF BRESCIA   (Italy)

Author keywords

Chemical gas sensor; Indium oxide; Iron; Ozone

Indexed keywords

CHEMICAL SENSORS; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; OZONE; SEMICONDUCTOR DOPING; THIN FILMS;

MICROSTRUCTURAL CHARACTERIZATION; OZONE SENSING; RHEOTAXIAL GROWTH AND THERMAL OXIDATION (RGTO) DEPOSITION TECHNIQUE;

INDIUM COMPOUNDS;

EID: 33747870165     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2006.04.026     Document Type: Article

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