Oxygen sensitivity of perovskite-type dielectric thin films

Materials Science and Engineering: B

Volumn 161, Issue 1-3, 2009, Pages 142-145

  Hara, Toru ^a   Ishiguro, Takashi ^a   Wakiya, Naoki ^b   Shinozaki, Kazuo ^c  

^a TAIYO YUDEN CO LTD   (Japan)

^b SHIZUOKA UNIVERSITY   (Japan)

^c TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Gas sensor; Oxygen sensor; Perovskite; Polaron; Thin film

Indexed keywords

BARIUM TITANATE; DIELECTRIC MATERIALS; OXYGEN SENSORS; PEROVSKITE SOLAR CELLS; POLARONS; SEMICONDUCTOR DEVICE MANUFACTURE; THIN FILMS; ZIRCONIA;

ADSORBED OXYGEN; CALIBRATION SYSTEM; DIELECTRIC THIN FILMS; GAS-SENSORS; IONIC POLARIZATION; OXYGEN SENSITIVITY; PEROVSKITE TYPE; POLARON; RESIDUAL OXYGEN; THIN-FILMS;

PEROVSKITE;

EID: 67349266206     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2009.01.012     Document Type: Article

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