Localized synthesis of horizontally suspended carbon nanotubes

Carbon

Volumn 57, Issue , 2013, Pages 259-266

  Lu, Jingyu ^a   Miao, Jianmin ^a   Norford, Leslie K ^b,c  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b SINGAPORE MIT ALLIANCE FOR RESEARCH AND TECHNOLOGY   (Singapore)

^c MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBES (CNT); ELECTRON BEAM EVAPORATION; LOCALIZED SYNTHESIS; LOWER TEMPERATURES; PROCESS COMPATIBILITY; SEMICONDUCTOR TECHNOLOGY; SILICON SUBSTRATES; STRONG DEPENDENCES;

ELECTRON BEAMS; HEATING EQUIPMENT; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTOR DEVICE MANUFACTURE;

CARBON NANOTUBES;

EID: 84875273223     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.carbon.2013.01.072     Document Type: Article

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