SCOPUS 정보 검색 플랫폼

Small

Volumn 9, Issue 6, 2013, Pages 905-912

Facile and clean release of vertical si nanowires by wet chemical etching based on alkali hydroxides

(2) Yoon, Sung Soo a Khang, Dahl Young a

a Yonsei University (South Korea)

Author keywords

arrays; field effect transistors; nanowires; oxidation; silicon

Indexed keywords

ALKALI HYDROXIDE; ARRAYS; ASSEMBLING TECHNIQUES; FLEXIBLE PLASTIC SUBSTRATES; METAL-ASSISTED CHEMICAL ETCHING; PROTECTIVE LAYERS; SI NANOWIRES (SINWS); VERTICAL ARRAYS;

FIELD EFFECT TRANSISTORS; FUNCTIONAL MATERIALS; NANOWIRES; OXIDATION; SILICON; SILICON OXIDES; WET ETCHING;

FABRICATION;

EID: 84875258959 PISSN: 16136810 EISSN: 16136829 Source Type: Journal
DOI: 10.1002/smll.201201804 Document Type: Article

Times cited : (13)

References (32)

1
- 85013690637
- Elsevier, New York.
- V. Kumar, Nanosilicon, Elsevier, New York 2008.
- (2008) Nanosilicon
- Kumar, V.¹

2
- 38049143961
- A. I. Hochbaum, R. Chen, R. D. Delgado, W. Liang, E. C. Garnett, M. Najarian, A. Majumdar, P. D. Yang, Nature 2008, 451, 163.
- (2008) Nature , vol.451 , pp. 163
- Hochbaum, A.I.¹ Chen, R.² Delgado, R.D.³ Liang, W.⁴ Garnett, E.C.⁵ Najarian, M.⁶ Majumdar, A.⁷ Yang, P.D.⁸

3
- 57649238234
- B. Z. Tian, T. J. Kempa, C. M. Lieber, Chem. Soc. Rev. 2009, 38, 16.
- (2009) Chem. Soc. Rev. , vol.38 , pp. 16
- Tian, B.Z.¹ Kempa, T.J.² Lieber, C.M.³

4
- 37849002504
- C. K. Chan, H. Feng, G. Liu, K. McIlwrath, X. Zhang, R. A. Huggins, Y. Cui, Nat. Nanotechnol. 2008, 3, 31.
- (2008) Nat. Nanotechnol. , vol.3 , pp. 31
- Chan, C.K.¹ Feng, H.² Liu, G.³ McIlwrath, K.⁴ Zhang, X.⁵ Huggins, R.A.⁶ Cui, Y.⁷

5
- 27144513329
- G. Zheng, F. Patolsky, Y. Cui, W. U. Wang, C. M. Lieber, Nat. Biotechnol. 2005, 23, 1294.
- (2005) Nat. Biotechnol. , vol.23 , pp. 1294
- Zheng, G.¹ Patolsky, F.² Cui, Y.³ Wang, W.U.⁴ Lieber, C.M.⁵

6
- 0037118955
- K. Q. Peng, Y. J. Yan, S. P. Gao, J. Zhu, Adv. Mater. 2002, 14, 1164.
- (2002) Adv. Mater. , vol.14 , pp. 1164
- Peng, K.Q.¹ Yan, Y.J.² Gao, S.P.³ Zhu, J.⁴

7
- 0037293981
- K. Q. Peng, Y. J. Yan, S. P. Gao, J. Zhu, Adv. Funct. Mater. 2003, 13, 127.
- (2003) Adv. Funct. Mater. , vol.13 , pp. 127
- Peng, K.Q.¹ Yan, Y.J.² Gao, S.P.³ Zhu, J.⁴

8
- 78650811764
- Z. Huang, N. Geyer, P. Werner, J. de Boor, U. Gosele, Adv. Mater. 2011, 23, 285.
- (2011) Adv. Mater. , vol.23 , pp. 285
- Huang, Z.¹ Geyer, N.² Werner, P.³ De Boor, J.⁴ Gosele, U.⁵

9
- 1042265993
- K. Q. Peng, Z. P. Huang, J. Zhu, Adv. Mater. 2004, 16, 73.
- (2004) Adv. Mater. , vol.16 , pp. 73
- Peng, K.Q.¹ Huang, Z.P.² Zhu, J.³

10
- 77955910351
- G. D. Yuan, Y. B. Zhou, C. S. Guo, W. J. Zhang, Y. B. Tang, Y. Q. Li, Z. H. Chen, Z. B. He, X. J. Zhang, P. F. Wang, I. Bello, R. Q. Zhang, C. S. Lee, S. T. Lee, ACS Nano 2010, 4, 3045.
- (2010) ACS Nano , vol.4 , pp. 3045
- Yuan, G.D.¹ Zhou, Y.B.² Guo, C.S.³ Zhang, W.J.⁴ Tang, Y.B.⁵ Li, Y.Q.⁶ Chen, Z.H.⁷ He, Z.B.⁸ Zhang, X.J.⁹ Wang, P.F.¹⁰ Bello, I.¹¹ Zhang, R.Q.¹² Lee, C.S.¹³ Lee, S.T.¹⁴

11
- 80052048842
- J.-H. Choi, J. Sung, K.-J. Moon, J. Jeon, Y. H. Kang, T. I. Lee, C. Park, J.-M. Myoung, J. Mater. Chem. 2011, 21, 13256.
- (2011) J. Mater. Chem. , vol.21 , pp. 13256
- Choi, J.-H.¹ Sung, J.² Moon, K.-J.³ Jeon, J.⁴ Kang, Y.H.⁵ Lee, T.I.⁶ Park, C.⁷ Myoung, J.-M.⁸

12
- 77249164255
- M. D. Kelzenberg, S. W. Boettcher, J. A. Petykiewicz, D. B. Turner-Evans, M. C. Putnam, E. L. Warren, J. M. Spurgeon, R. M. Briggs, N. S. Lewis, H. A. Atwater, Nat. Mater. 2010, 9, 239.
- (2010) Nat. Mater. , vol.9 , pp. 239
- Kelzenberg, M.D.¹ Boettcher, S.W.² Petykiewicz, J.A.³ Turner-Evans, D.B.⁴ Putnam, M.C.⁵ Warren, E.L.⁶ Spurgeon, J.M.⁷ Briggs, R.M.⁸ Lewis, N.S.⁹ Atwater, H.A.¹⁰

13
- 65949103185
- W. Xu, V. Palshin, J. C. Flake, J. Electrochem. Soc. 2009, 156, H544.
- (2009) J. Electrochem. Soc. , vol.156
- Xu, W.¹ Palshin, V.² Flake, J.C.³

14
- 77949465915
- T. I. Lee, W. J. Choi, K.-J. Moon, J.-H. Choi, J. P. Kar, S. N. Das, Y. S. Kim, H. K. Baik, J.-M. Myoung, Nano Lett. 2010, 10, 1016.
- (2010) Nano Lett. , vol.10 , pp. 1016
- Lee, T.I.¹ Choi, W.J.² Moon, K.-J.³ Choi, J.-H.⁴ Kar, J.P.⁵ Das, S.N.⁶ Kim, Y.S.⁷ Baik, H.K.⁸ Myoung, J.-M.⁹

15
- 79952607436
- J. M. Weisse, D. R. Kim, C. H. Lee, X. Zheng, Nano Lett. 2011, 11, 1300.
- (2011) Nano Lett. , vol.11 , pp. 1300
- Weisse, J.M.¹ Kim, D.R.² Lee, C.H.³ Zheng, X.⁴

16
- 77951035525
- A. Pevzner, Y. Engel, R. Elnathan, T. Ducobni, M. Ben-Ishai, K. Reddy, N. Shpaisman, A. Tsukernik, M. Oksman, F. Patolsky, Nano Lett. 2010, 10, 1202.
- (2010) Nano Lett. , vol.10 , pp. 1202
- Pevzner, A.¹ Engel, Y.² Elnathan, R.³ Ducobni, T.⁴ Ben-Ishai, M.⁵ Reddy, K.⁶ Shpaisman, N.⁷ Tsukernik, A.⁸ Oksman, M.⁹ Patolsky, F.¹⁰

17
- 68949142663
- CRC Press, New York.
- M. J. Madou, Fundamentals of Microfabrication and Nanotechnology, CRC Press, New York 2012.
- (2012) Fundamentals of Microfabrication and Nanotechnology
- Madou, M.J.¹

18
- 0000915839
- I. J. Pugacz-Muraszkiewicz, IBM J. Res. Dev. 1972, 16, 523.
- (1972) IBM J. Res. Dev. , vol.16 , pp. 523
- Pugacz-Muraszkiewicz, I.J.¹

19
- 0024922970
- P. Akhter, A. Baig, A. Mufti, J. Phys. D: Appl. Phys. 1989, 22, 1924.
- (1989) J. Phys. D: Appl. Phys. , vol.22 , pp. 1924
- Akhter, P.¹ Baig, A.² Mufti, A.³

20
- 0027573939
- P. Allongue, V. Costa-Kieling, H. J. Gerischer, J. Electrochem. Soc. 1993, 140, 1018.
- (1993) J. Electrochem. Soc. , vol.140 , pp. 1018
- Allongue, P.¹ Costa-Kieling, V.² Gerischer, H.J.³

21
- 32244438112
- K. Q. Peng, J. J. Hu, Y. J. Yan, Y. Wu, H. Fang, Y. Xu, S. T. Lee, J. Zhu, Adv. Funct. Mater. 2006, 16, 387.
- (2006) Adv. Funct. Mater. , vol.16 , pp. 387
- Peng, K.Q.¹ Hu, J.J.² Yan, Y.J.³ Wu, Y.⁴ Fang, H.⁵ Xu, Y.⁶ Lee, S.T.⁷ Zhu, J.⁸

22
- 33750297509
- K. Q. Peng, H. Fang, J. J. Hu, Y. Wu, J. Zhu, Y. J. Yan, S. T. Lee, Chem. Eur. J. 2006, 12, 7942.
- (2006) Chem. Eur. J. , vol.12 , pp. 7942
- Peng, K.Q.¹ Fang, H.² Hu, J.J.³ Wu, Y.⁴ Zhu, J.⁵ Yan, Y.J.⁶ Lee, S.T.⁷

23
- 0346961325
- H. Kobayashi, O. Maida, M. Takahashi, H. Iwasa, J. Appl. Phys. 2003, 94, 7328.
- (2003) J. Appl. Phys. , vol.94 , pp. 7328
- Kobayashi, H.¹ Maida, O.² Takahashi, M.³ Iwasa, H.⁴

24
- 69949181606
- N. E. Grant, K. R. McIntosh, IEEE Electron Dev. Lett. 2009, 30, 922.
- (2009) IEEE Electron Dev. Lett. , vol.30 , pp. 922
- Grant, N.E.¹ McIntosh, K.R.²

25
- 77955511506
- K.-J. Moon, J.-H. Choi, T. I. Lee, M.-H. Ham, W.-J. Maeng, I. Hwang, H. Kim, J.-M. Myoung, Microelectron. Eng. 2010, 87, 2407.
- (2010) Microelectron. Eng. , vol.87 , pp. 2407
- Moon, K.-J.¹ Choi, J.-H.² Lee, T.I.³ Ham, M.-H.⁴ Maeng, W.-J.⁵ Hwang, I.⁶ Kim, H.⁷ Myoung, J.-M.⁸

26
- 0034824859
- H. Huang, X. Duan, Q. Wei, C. M. Lieber, Science 2001, 291, 630.
- (2001) Science , vol.291 , pp. 630
- Huang, H.¹ Duan, X.² Wei, Q.³ Lieber, C.M.⁴

27
- 33845577923
- B. Sun, H. Sirringhaus, J. Am. Chem. Soc. 2006, 128, 16231.
- (2006) J. Am. Chem. Soc. , vol.128 , pp. 16231
- Sun, B.¹ Sirringhaus, H.²

28
- 58149173945
- M. Engel, J. P. Small, M. Steiner, M. Freitag, A. A. Green, M. C. Hersam, P. Avouris, ACS Nano 2008, 2, 2445.
- (2008) ACS Nano , vol.2 , pp. 2445
- Engel, M.¹ Small, J.P.² Steiner, M.³ Freitag, M.⁴ Green, A.A.⁵ Hersam, M.C.⁶ Avouris, P.⁷

29
- 34249938954
- G. Yu, A. Cao, C. M. Lieber, Nat. Nanotechnol. 2007, 2, 372.
- (2007) Nat. Nanotechnol. , vol.2 , pp. 372
- Yu, G.¹ Cao, A.² Lieber, C.M.³

30
- 61649092562
- K. Heo, E. Cho, J. E. Yang, M. H. Kim, M. Lee, B. Y. Lee, S. G. Kwon, M. S. Lee, M. H. Jo, H. J. Choi, Nano Lett. 2008, 8, 4523.
- (2008) Nano Lett. , vol.8 , pp. 4523
- Heo, K.¹ Cho, E.² Yang, J.E.³ Kim, M.H.⁴ Lee, M.⁵ Lee, B.Y.⁶ Kwon, S.G.⁷ Lee, M.S.⁸ Jo, M.H.⁹ Choi, H.J.¹⁰

31
- 84861149642
- J. Seo, H. Lee, S. Lee, T. I. Lee, J.-M. Myoung, T. Lee, Small 2012, 8, 1614.
- (2012) Small , vol.8 , pp. 1614
- Seo, J.¹ Lee, H.² Lee, S.³ Lee, T.I.⁴ Myoung, J.-M.⁵ Lee, T.⁶

32
- 72249089042
- W. Xu, J. C. Flake, J. Electrochem. Soc. 2010, 157, A41.
- (2010) J. Electrochem. Soc. , vol.157
- Xu, W.¹ Flake, J.C.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.