Synthesis of hafnium(IV) β-ketoiminates as potential precursors for the MOCVD of HfO2

Inorganica Chimica Acta

Volumn 396, Issue , 2013, Pages 60-65

  González Flores, Diego ^a   Patil, Siddappa A ^b   Medina, Phillip A ^b   Dever, Seth ^b   Uthaisar, Chananate ^b   Pineda, Leslie W ^a   Montero, Mavis L ^a   Ziller, Joseph W ^c   Fahlman, Bradley D ^b  

^a UNIVERSIDAD DE COSTA RICA   (Costa Rica)

^b CENTRAL MICHIGAN UNIVERSITY   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Hafnium compounds; High dielectric; Metal organic chemical vapor deposition (MOCVD); Sublimation enthalpy; Thermogravimetric analysis (TGA); Volatility

Indexed keywords

CHEMICAL ANALYSIS; HAFNIUM COMPOUNDS; HAFNIUM OXIDES; METALLORGANIC CHEMICAL VAPOR DEPOSITION; ORGANIC CHEMICALS; ORGANOMETALLICS; SINGLE CRYSTALS;

A3. METAL ORGANIC CHEMICAL VAPOR DEPOSITION (MOCVD); DIMETHYLAMIDO; SINGLE CRYSTAL X-RAY DIFFRACTION; SUBLIMATION ENTHALPY; TETRAKIS; VOLATILITY;

THERMOGRAVIMETRIC ANALYSIS;

EID: 84875244529     PISSN: 00201693     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ica.2012.10.002     Document Type: Article

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