Thermal conductivity measurement of AlN films by fast photothermal method

Journal of Physics: Conference Series

Volumn 395, Issue 1, 2012, Pages

  Ait Aissa, K ^a   Semmar, N ^b   De Sousa Meneses, D ^c   Le Brizoual, L ^a   Gaillard, M ^b   Petit, A ^b   Jouan, P Y ^a   Boulmer Leborgne, C ^b   Djouadi, M A ^a  

^a UNIVERSITÉ DE NANTES   (France)

^b UNIVERSITÉ D'ORLÉANS   (France)

^c Centre National de la Recherche Scientifique   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COATINGS; ALUMINUM NITRIDE; ELLIPSOMETRY; ENERGY GAP; FILM THICKNESS; SCANNING ELECTRON MICROSCOPY; THERMAL CONDUCTIVITY; THERMAL CONDUCTIVITY OF SOLIDS; X RAY DIFFRACTION;

ALUMINUM NITRIDE (ALN); CRYSTALLINE QUALITY; DIRECT CURRENT MAGNETRON SPUTTERING; EFFECTIVE THERMAL CONDUCTIVITY; PHOTOTHERMAL METHODS; SI (100) SUBSTRATE; THERMAL CONDUCTIVITY MEASUREMENTS; X RAY ROCKING CURVE;

OPTICAL FILMS;

EID: 84875018386     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/395/1/012089     Document Type: Conference Paper

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