Structural and opto-electric properties of Ga and F codoped ZnO thin films on PC substrates

Vacuum

Volumn 94, Issue , 2013, Pages 81-83

  Shi, Qian ^a,b   Zhou, Kesong ^a,b   Dai, Mingjiang ^a   Lin, Songsheng ^a   Hou, Huijun ^a   Wei, Chunbei ^a   Hu, Fang ^a  

^a Guangdong General Research Institute of Industrial Technology   (China)

^b SOUTH CHINA UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Electrical properties; Ga F codoped ZnO films; Optical properties; Physical vapour deposition; Polycarbonate substrates

Indexed keywords

CO-DOPED ZNO; COMBINED EFFECT; CRYSTALLINITIES; LOW RESISTIVITY; MF MAGNETRON SPUTTERING; PHYSICAL VAPOUR DEPOSITION; POLYCARBONATE SUBSTRATES; THERMAL EXPANSION COEFFICIENTS;

CRACKS; DOPING (ADDITIVES); GALLIUM; GALLIUM ALLOYS; METALLIC FILMS; OPTICAL FILMS; OPTICAL PROPERTIES; POLYCARBONATES; SCANNING ELECTRON MICROSCOPY; THERMAL EXPANSION; THIN FILMS; X RAY DIFFRACTION; ZINC OXIDE;

ELECTRIC PROPERTIES;

EID: 84874868293     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2013.01.008     Document Type: Article

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