SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 520, Issue 17, 2012, Pages 5683-5690

Stress relief patterns of Co films deposited on circular silicone oil substrates

(6) Yu, Sen Jiang a Zhou, Hong a Zhang, Yong Ju b Chen, Miao Gen a Jiao, Zhi Wei a Si, Ping Zhan a

a CHINA JILIANG UNIVERSITY (China)

b TAIZHOU UNIVERSITY (China)

Author keywords

Crack; Internal stress; Liquid substrate; Sputtering; Wrinkling

Indexed keywords

CO FILMS; DIRECT CURRENT MAGNETRON SPUTTERING; GLASS SURFACES; GROWTH MECHANISMS; LIQUID SUBSTRATE; METAL FILM; PHYSICAL MECHANISM; RELIEF PATTERNS; SILICONE OIL; STRUCTURAL CHARACTERISTICS; SUBSEQUENT COOLING; WRINKLING;

COBALT; CRACKS; LIQUIDS; MECHANICAL PROPERTIES; METALLIC FILMS; RESIDUAL STRESSES; SILICONES; SPUTTERING;

SUBSTRATES;

EID: 84861829343 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2012.04.054 Document Type: Article

Times cited : (11)

References (28)

1
- 0037051238
- C. Coupeau Thin Solid Films 406 2002 190
- (2002) Thin Solid Films , vol.406 , pp. 190
- Coupeau, C.¹

2
- 2642577523
- M.W. Moon, K.R. Lee, K.H. Oh, and J.W. Hutchinson Acta Mater. 52 2004 3151
- (2004) Acta Mater. , vol.52 , pp. 3151
- Moon, M.W.¹ Lee, K.R.² Oh, K.H.³ Hutchinson, J.W.⁴

3
- 33751102690
- M.J. Cordill, D.F. Bahr, N.R. Moody, and W.W. Gerberich Mater. Sci. Eng., A 443 2007 150
- (2007) Mater. Sci. Eng., A , vol.443 , pp. 150
- Cordill, M.J.¹ Bahr, D.F.² Moody, N.R.³ Gerberich, W.W.⁴

4
- 78650201238
- A.A. Abdallah, P.C.P. Bouten, J.M.J. den Toonder, and G. de With Surf. Coat. Technol. 205 2011 3103
- (2011) Surf. Coat. Technol. , vol.205 , pp. 3103
- Abdallah, A.A.¹ Bouten, P.C.P.² Den Toonder, J.M.J.³ De With, G.⁴

5
- 0032516193
- N. Bowden, S. Brittain, A.G. Evans, J.W. Hutchinson, and G.M. Whitesides Nature 393 1998 146
- (1998) Nature , vol.393 , pp. 146
- Bowden, N.¹ Brittain, S.² Evans, A.G.³ Hutchinson, J.W.⁴ Whitesides, G.M.⁵

6
- 12344332722
- X. Chen, and J.W. Hutchinson J. Appl. Mech. 71 2004 597
- (2004) J. Appl. Mech. , vol.71 , pp. 597
- Chen, X.¹ Hutchinson, J.W.²

7
- 4344646351
- P.J. Yoo, K.Y. Suh, H. Kang, and H.H. Lee Phys. Rev. Lett. 93 2004 034301
- (2004) Phys. Rev. Lett. , vol.93 , pp. 034301
- Yoo, P.J.¹ Suh, K.Y.² Kang, H.³ Lee, H.H.⁴

8
- 35948991119
- H. Vandeparre, J. Léopoldès, C. Poulard, S. Desprez, G. Derue, C. Gay, and P. Damman Phys. Rev. Lett. 99 2007 188302
- (2007) Phys. Rev. Lett. , vol.99 , pp. 188302
- Vandeparre, H.¹ Léopoldès, J.² Poulard, C.³ Desprez, S.⁴ Derue, G.⁵ Gay, C.⁶ Damman, P.⁷

9
- 77951687156
- S.J. Yu, Y.J. Zhang, and M.G. Chen Int. J. Mod. Phys. B 24 2010 997
- (2010) Int. J. Mod. Phys. B , vol.24 , pp. 997
- Yu, S.J.¹ Zhang, Y.J.² Chen, M.G.³

10
- 0000376750
- G.X. Ye, Th. Michely, V. Weidenhof, I. Friedrich, and M. Wuttig Phys. Rev. Lett. 81 1998 622
- (1998) Phys. Rev. Lett. , vol.81 , pp. 622
- Ye, G.X.¹ Michely, Th.² Weidenhof, V.³ Friedrich, I.⁴ Wuttig, M.⁵

11
- 0042029451
- M. Voigt, S. Dorsfeld, A. Volz, and M. Sokolowski Phys. Rev. Lett. 91 2003 026103
- (2003) Phys. Rev. Lett. , vol.91 , pp. 026103
- Voigt, M.¹ Dorsfeld, S.² Volz, A.³ Sokolowski, M.⁴

12
- 33144455570
- X. Liu, and M. Wuttig Phys. Rev. B 73 2006 033405
- (2006) Phys. Rev. B , vol.73 , pp. 033405
- Liu, X.¹ Wuttig, M.²

13
- 67650494953
- P.G. Cai, S.J. Yu, X.J. Xu, M.G. Chen, C.H. Sui, and G.X. Ye Appl. Surf. Sci. 255 2009 8352
- (2009) Appl. Surf. Sci. , vol.255 , pp. 8352
- Cai, P.G.¹ Yu, S.J.² Xu, X.J.³ Chen, M.G.⁴ Sui, C.H.⁵ Ye, G.X.⁶

14
- 77953816625
- S.J. Yu, Y.J. Zhang, and M.G. Chen Chin. Phys. Lett. 27 2010 066803
- (2010) Chin. Phys. Lett. , vol.27 , pp. 066803
- Yu, S.J.¹ Zhang, Y.J.² Chen, M.G.³

15
- 0034207498
- K.A. Shorlin, J.R. de Bruyn, M. Graham, and S.W. Morris Phys. Rev. E 61 2000 6950
- (2000) Phys. Rev. e , vol.61 , pp. 6950
- Shorlin, K.A.¹ De Bruyn, J.R.² Graham, M.³ Morris, S.W.⁴

16
- 0037017905
- Z. Néda, K.-T. Leung, L. Józsa, and M. Ravasz Phys. Rev. Lett. 88 2002 095502
- (2002) Phys. Rev. Lett. , vol.88 , pp. 095502
- Néda, Z.¹ Leung, K.-T.² Józsa, L.³ Ravasz, M.⁴

17
- 0346962963
- S.J. Yu, Y.J. Zhang, Q.L. Ye, P.G. Cai, X.W. Tang, and G.X. Ye Phys. Rev. B 68 2003 193403
- (2003) Phys. Rev. B , vol.68 , pp. 193403
- Yu, S.J.¹ Zhang, Y.J.² Ye, Q.L.³ Cai, P.G.⁴ Tang, X.W.⁵ Ye, G.X.⁶

18
- 25144439935
- S.J. Yu, Q.L. Ye, Y.J. Zhang, P.G. Cai, X.J. Xu, J.X. Chen, and G.X. Ye Thin Solid Films 491 2005 311
- (2005) Thin Solid Films , vol.491 , pp. 311
- Yu, S.J.¹ Ye, Q.L.² Zhang, Y.J.³ Cai, P.G.⁴ Xu, X.J.⁵ Chen, J.X.⁶ Ye, G.X.⁷

19
- 0037105126
- X.M. Tao, G.X. Ye, Q.L. Ye, J.S. Jin, Y.F. Lao, and Z.K. Jiao Phys. Rev. B 66 2002 115406
- (2002) Phys. Rev. B , vol.66 , pp. 115406
- Tao, X.M.¹ Ye, G.X.² Ye, Q.L.³ Jin, J.S.⁴ Lao, Y.F.⁵ Jiao, Z.K.⁶

20
- 69549126261
- S.J. Yu, Y.J. Zhang, and M.G. Chen Thin Solid Films 518 2009 222
- (2009) Thin Solid Films , vol.518 , pp. 222
- Yu, S.J.¹ Zhang, Y.J.² Chen, M.G.³

21
- 0000803432
- G.X. Ye, Q.R. Zhang, C.M. Feng, H.L. Ge, and Z.K. Jiao Phys. Rev. B 54 1996 14754
- (1996) Phys. Rev. B , vol.54 , pp. 14754
- Ye, G.X.¹ Zhang, Q.R.² Feng, C.M.³ Ge, H.L.⁴ Jiao, Z.K.⁵

22
- 0032630336
- C.M. Feng, H.L. Ge, M.R. Tang, G.X. Ye, and Z.K. Jiao Thin Solid Films 342 1999 30
- (1999) Thin Solid Films , vol.342 , pp. 30
- Feng, C.M.¹ Ge, H.L.² Tang, M.R.³ Ye, G.X.⁴ Jiao, Z.K.⁵

23
- 0037020981
- B. Yang, A.G. Xia, J.S. Jin, Q.L. Ye, Y.F. Lao, Z.K. Jiao, and G.X. Ye J. Phys. Condens. Matter 14 2002 10051
- (2002) J. Phys. Condens. Matter , vol.14 , pp. 10051
- Yang, B.¹ Xia, A.G.² Jin, J.S.³ Ye, Q.L.⁴ Lao, Y.F.⁵ Jiao, Z.K.⁶ Ye, G.X.⁷

24
- 0000678066
- N. Bowden, W.T.S. Huck, K.E. Paul, and G.M. Whitesides Appl. Phys. Lett. 75 1999 2557
- (1999) Appl. Phys. Lett. , vol.75 , pp. 2557
- Bowden, N.¹ Huck, W.T.S.² Paul, K.E.³ Whitesides, G.M.⁴

25
- 0000008368
- D.B.H. Chua, H.T. Ng, and S.F.Y. Li Appl. Phys. Lett. 76 2000 721
- (2000) Appl. Phys. Lett. , vol.76 , pp. 721
- Chua, D.B.H.¹ Ng, H.T.² Li, S.F.Y.³

26
- 16244423019
- K. Efimenko, M. Rackaitis, E. Manias, A. Vaziri, L. Mahadevan, and J. Genzer Nat. Mater. 4 2005 293
- (2005) Nat. Mater. , vol.4 , pp. 293
- Efimenko, K.¹ Rackaitis, M.² Manias, E.³ Vaziri, A.⁴ Mahadevan, L.⁵ Genzer, J.⁶

27
- 21844432711
- Z.Y. Huang, W. Hong, and Z. Suo J. Mech. Phys. Solids 53 2005 2101
- (2005) J. Mech. Phys. Solids , vol.53 , pp. 2101
- Huang, Z.Y.¹ Hong, W.² Suo, Z.³

28
- 4344569742
- C.M. Stafford, C. Harrison, K.L. Beers, A. Karim, E.J. Amis, M.R. VanLandingham, H.-C. Kim, W. Volksen, R.D. Miller, and E.E. Simonyi Nat. Mater. 3 2004 545
- (2004) Nat. Mater. , vol.3 , pp. 545
- Stafford, C.M.¹ Harrison, C.² Beers, K.L.³ Karim, A.⁴ Amis, E.J.⁵ Vanlandingham, M.R.⁶ Kim, H.-C.⁷ Volksen, W.⁸ Miller, R.D.⁹ Simonyi, E.E.¹⁰

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.