Three-dimensional imaging of copper pillars using x-ray tomography within a scanning electron microscope: A simulation study based on synchrotron data

Review of Scientific Instruments

Volumn 84, Issue 2, 2013, Pages

  Martin, N ^a   Bertheau, J ^a   Bleuet, P ^b   Charbonnier, J ^a   Hugonnard, P ^a   Laloum, D ^a,b   Lorut, F ^a   Tabary, J ^b  

^a STMICROELECTRONICS   (France)

^b CEA GRENOBLE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

3-D NUMERICAL MODELS; CONE BEAM TOMOGRAPHY; EUROPEAN SYNCHROTRON RADIATION FACILITIES; MICRO-ELECTRONIC DEVICES; NANOMETER RESOLUTIONS; SCANNING ELECTRON MICROSCOPE; SURFACE-SENSITIVE TECHNIQUE; THREE DIMENSIONAL IMAGING;

COMPUTERIZED TOMOGRAPHY; ELECTRON BEAMS; INTERMETALLICS; MICROELECTRONICS; RADIOGRAPHY; SCANNING ELECTRON MICROSCOPY; THREE DIMENSIONAL COMPUTER GRAPHICS; TOMOGRAPHY; X RAYS;

IMAGING SYSTEMS;

EID: 84874825981     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4792377     Document Type: Conference Paper

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