Towards 100 nm resolution X-ray tomography

IEEE Nuclear Science Symposium Conference Record

Volumn , Issue , 2009, Pages 1335-1338

  Bruyndonckx, P ^a   Sasov, A ^a   Pauwels, B ^a   Liu, X ^a  

^a SkyScan Belgium   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

DEPTH OF FOCUS; DETECTOR RESPONSE; NANO-FOCUS; NM RESOLUTION; SIMULATION STUDIES; SUB-100 NM; TOMOGRAPHIC IMAGING; TRANSMISSION TARGET; X RAY TARGETS; X-RAY PROJECTION IMAGES; X-RAY SOURCES; X-RAY TOMOGRAPHY;

CURVE FITTING; TOMOGRAPHY;

NUCLEAR PHYSICS;

EID: 77951202497     PISSN: 10957863     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NSSMIC.2009.5402349     Document Type: Conference Paper

References (9)

1. Chu, Y.S. (2008). "Hard x-ray microscopy with Fresnel zone plates reaches 40 nm Rayleigh resolution", Appl. Physics letters, 92, 103119
2. Suzuki, Y. (2008). "Making hard x-ray micro-focus beam with Fresnel zone plate optics", Spring-8 summer school text
3. Brunke, O. (2008). "Comparison between x-ray tube based and synchrotron radiation based uCT", Developments in X-ray Tomography VI, Proc. of SPIE Vol. 7078
4. Hamamatsu (2009). "Microfocus x-ray source series", http ://sales.hamamatsu.com/assets/pdf/catsandguides/MFX-TLSO 1063 E04.pdf
5. Tohken, 2009. "0.4 mm focus x-ray inspection system TUX-3000W", http://www.tohken.co.jp/en/viwl.php?prodl00=87&pic=ti xr.gif
6. SkyScan NV, http://www.skyscan.be/products/SEM-microCT.htm
7. Cowley, J.M. (1990), "Diffraction physics" (North-Holland, Amsterdam)
8. Demers, H. (2004). Win X-ray, Version 1.2.1.13, http:// montecarlomodeling.mcgill.ca/software/winxray/winxray.html
9. Jan, S. et Al. (2004). "GATE: a simulation toolkit for PET and SPECT", Phys. Med. Biol. 49 (2004) 4543-4561